Optical pulse transmission system, optical pulse transmitting method, and optical pulse detecting method

ABSTRACT

An optical transmission system is provided, which permits high-precision optical transmission of a signal even if the signal has a high accurate timing, an indefinite period, and a DC component. The transmitting side is provided with a rise edge detecting circuit  1  for detecting the rise edge of a transmitting signal waveform, a transmitting pulse generating circuit  2  for generating a transmitting pulse signal (b) constituted by a pair of opposite-polarity pulses inverting their polarities at the detected timing, and a light intensity modulation circuit  3  for generating a light intensity modulated signal (c) based on the pulse signal (b). The receiving side is provided with an AC-coupled receiving circuit  4  for receiving the light intensity modulated signal (c) and extracting therefrom only an AC component, and a discrimination circuit  5  for discriminating the rise timing from the received signal. Further, a similar arrangement is provided for transmitting a signal associated with the fall edge of the transmitting signal waveform. On the basis of the discriminated rise timing and the fall timing, the rise edge and the fall edge of the original transmitting signal waveform are regenerated.

TECHNICAL FIELD

The present invention relates to an optical pulse transmission systemand an optical pulse transmitting method which permit high-speedtransmission of electric signal pulses after converting them intooptical pulses. The present invention also pertains to a waveformconverting method advantageous for use at the transmitting side forconversion of the electric signal pulses to optical pulses and a lightintensity modulator advantageous for use at the transmitting side forthe modulation of light, and an optical pulse detecting methodadvantageous for use at the receiving side for the detection of theoptical pulses transmitted thereto.

BACKGROUND ART

Many of semiconductor device testing apparatus (commonly called ICtesters) for testing various semiconductor devices, includingsemiconductor integrated circuits (ICs), for instance, employ asemiconductor device transporting and processing or handling apparatus(commonly called a handler) which transports semiconductor devices fortesting and sorts out tested semiconductor devices based on the testresults. In the semiconductor device testing apparatus of the type thathas the semiconductor device transporting and processing or handlingapparatus (hereinafter referred to as handler) connected thereto, a testhead for applying a test signal of a predetermined pattern to asemiconductor device under test (commonly called DUT) is placed in atest section of the handler away from the main body (tester proper) ofthe semiconductor device testing apparatus. The test head and the testerproper are connected via an electric signal transmission line such as acable, through which the test signal of a predetermined pattern is fedfrom the tester proper to the test head, and the test signal is appliedto the semiconductor device under test via a socket mounted on the testhead. A response signal from the semiconductor device under test is sentover the electric signal transmission line from the test head to thetester proper for measuring electrical properties of the semiconductordevice.

In recent years, semiconductor integrated circuits (hereinafter referredto as ICs) are becoming faster and the number of terminals (pins)mounted on the package is also on the increase. As a result, thetransmission of an electric signal over a transmission line such as acable as in the above-mentioned semiconductor device testing apparatuswill cause such defects as listed below.

(1) With the use of the cable or similar electric wire, there is a limitto the frequency of the electric signal for transmission therethrough,and an increase in the signal frequency is likely to cause thedegradation of the signal waveform. This imposes severe limitations onthe signal transmission rate, making it difficult to test fast-actingICs.

(2) Cables now in use are so thick that an increase in the number ofcables with an increase in the number of IC terminals will inevitablymake thick, heavy and hence hard-to-handle the bundle of cables betweenthe tester proper and the test head.

As a solution to the above-mentioned problems, an optical transmissionsystem has recently come into use which is excellent in the signaltransmission rate and in the frequency characteristic as compared withthe above-mentioned electric transmission system and is capable ofemploying, as its transmission medium, an optical fiber or liketransmission line which is thin and light. Next, a common opticaltransmission system will be described.

For the generation of a binary digital signal (optical pulses) bymodulating light, a light intensity modulation system which changes theintensity of light according to an information signal (a modulationsignal) is used in most instances because of simplicity of themodulation techniques involved. Usually, the light intensity modulationsystem has a configuration in which a laser diode capable of fast lightintensity modulation is provided as a light emitting device at thetransmitting side, a fast-response photodiode is provided at thereceiving side and an optical fiber is used as a transmission medium;optical pulses emitted from the laser diode at the transmitting side aresent over the optical fiber to the receiving side, where the opticalpulses sent thereto are converted by the photodiode to electric signals.

FIG. 23 is circuit diagram schematically depicting an example of aconventional optical transmission system using an optical transmissionline. The illustrated optical transmission system comprises an opticalpulse transmitting device 101, an optical pulse receiving device 102,and an optical transmission line 109, such as an optical fiber, forinterconnecting the transmitting device 101 and the receiving device102.

The optical pulse transmitting device 101 is provided with a maincircuit 103 for outputting an electric pulse signal to be sent to thereceiver side, a driving circuit 104 connected at its input terminal toan output terminal 103A of the main circuit 103, and a semiconductorlaser or similar light emitting device 105 connected between the outputterminal of the driving circuit 104 and a common conductor. The lightemitting device 105 responds to an electric pulse signal fed theretofrom the driving circuit 104 to emit light and hence generate opticalpulses, which are provided via an optical connector 109A onto theoptical transmission line 109 for transmission to the optical pulsereceiving device 102.

The optical pulse receiving device 102 comprises a photodiode or similarphotodetector 106, a detecting circuit 107 connected at its inputterminal to the output terminal of the photodetector 106, and a maincircuit 108 connected at its input terminal to the output terminal ofthe detecting circuit 107; the optical pulses sent over the opticaltransmission line 109 are input into the photodetector 106 via anoptical connector 109B. The photodetector 106 converts the receivedoptical pulses to an electric pulse signal, and applies it to thedetecting circuit 107. The detecting circuit (usually formed by acurrent-to-voltage converting amplifier) 107 detects the electric pulsesignal fed thereto and provides it to the main circuit 108. The maincircuit 108 performs various processes based on the electric pulsesignal input thereto.

In general, a laser diode is used as the light emitting device 105, butas is well-known in the art, the laser diode has a defect that thequantity of light emitted therefrom varies with a temperature change.FIG. 24 shows injected current vs. output light power characteristics ofthe laser diode. In FIG. 24 the curve A indicates the injected currentvs. output light power at a temperature T1 (° C.) and the curve B theinjected current vs. output light power at a temperature T2 (° C.)(where T1<T2).

As is evident from FIG. 24, current values I_(ON1) and I_(ON2) fordriving the laser diode to emit light vary with ambient temperature. Asa result, if a driving current I_(D) of the same peak value as theabove-mentioned current values is used to drive the light emittingdevice 105 by the driving circuit 104, the light emitting device 105outputs an optical pulse OP1 at the temperature T1 (° C.) and an opticalpulse OP2 at T2 (° C.) as depicted in FIG. 24.

As will easily be understood from FIG. 24, an ambient temperaturevariation will cause a change in the power of the optical pulse that isoutput from the light emitting device 105. Hence, in the case ofreceiving the optical pulses OP1 and OP2 by the optical pulse receivingdevice 102, optical pulse waveforms, which cross a threshold voltage ECfor detecting the reception of the optical pulses, lag in timingaccording as peak values of the received signals are large or small, asindicated by Δt1 and Δt2 in FIG. 25. This entails a disadvantage thatthe temperature variation is sent as jitter to the receiving device 102.

A real-world example in which the generation of jitter isdisadvantageous can be found, for example, in the application of theabove-mentioned optical transmission system to the semiconductor devicetester. As referred to above, in the semiconductor device tester thetest head with a socket mounted thereon is placed apart from the testerproper. The test head comprises a driver for applying a test signal of apredetermined pattern or the like to the semiconductor device undertest, a comparator for receiving a response output signal from thesemiconductor device under test and for making a logical-level decision;furthermore, the test head serves as an interface with the semiconductordevice. And there are provided many signal transmission lines betweenthe tester proper and the test head.

Where these signal transmission lines are each formed by an opticaltransmission line like an optical fiber to transmit a high-speed signal(an optical pulse), the optical transmission line 109 needs to have amulti-channel structure. In a system configured to transmit and receiveoptical signals over such a multi-channel optical transmission line, atemperature change causes jitter in the pulse being transmitted;furthermore, when the amount of jitter differs for each channel, atiming error is induced between optical signals sent over thetransmission lines of the respective channels, making it impossible totest semiconductor devices (ICs) under normal conditions.

In FIG. 26 there is depicted an example of a light intensity modulatorfor use in such an optical transmission system as mentioned above. Thislight intensity modulator is equipped with an input side comparator 200which receives the signal voltage of a digital input signal (an electricpulse signal) and a threshold voltage and compares these voltages, acurrent switching circuit 201 which turns ON/OFF in accordance with theresult of comparison by the input side comparator 200, and asemiconductor laser 202 which is driven on the basis of a currentwaveform resulting from the ON/OFF operation of the current switchingcircuit 201. The current switching circuit 201 comprises a pair oftransistors TR1 and TR2 having their emitter connected in common, and apair of transistors 203 and 205 having their bases connected in common.The collectors of the pair of transistors TR1 and TR2 are connected toterminals of the semiconductor laser 202 corresponding thereto,respectively, and their common-connected emitter is connected to thecollector of the transistor 203.

In the light intensity modulator of the above construction, when theright-hand transistor TR2 of the pair of emitter-common transistors TR1and TR2 forming the current switching circuit 201 is ON, currentcontrolled by the transistor 203 in advance is injected into thesemiconductor laser 202, which generates an optical output of a levelcorresponding to the magnitude of the injected current. Incidentally, aDC bias current necessary for driving the semiconductor laser 202 iscontrolled by a transistor 204 which has its collector connected to acurrent injection terminal of the semiconductor laser 202.

By generating a binary optical signal, i.e. optical pulses by the abovelight intensity modulator, it is possible to implement an opticaltransmission system which transmits optical pulses at high speed. Forexample, in the aforementioned semiconductor device tester, however,pulses of many different periods are mixed on the optical signaltransmission line between the tester proper and the test head; moreover,very high precision of timing is required in the modulation of light.Accordingly, the application of the above-mentioned optical transmissionsystem to the semiconductor device tester may encounter such problems asmentioned below.

(1) In general, the light intensity is unstable in level (thelow-frequency component fluctuates greatly); therefore, when a binaryoptical signal is discriminated using a fixed threshold level at thereceiving side as depicted at the lower part in FIG. 27, errors occur indata (0, 1) and timing as shown. The upper waveform in FIG. 27 shows anelectric pulse to be sent from the transmitting side.

(2) The rise time (a light emission delay time) of such a light emittingdevice as a semiconductor laser varies with the device temperature, andin general, the rise time differs from one device to another. Hence, thelight emission delay time differs with temperature changes or withdevices as shown in FIG. 28. The difference in the light emission delaytime constitutes a factor in causing the above-mentioned timing error.

To solve the above problem (1), there have been proposed a method thateffects temperature control to keep the device temperature constant anda method that monitors the light intensity and maintains the deviceoutput at a fixed level (to stabilize the light intensity). However,either method involves an expensive transmission module, and hencepresents a problem in terms of cost although it can be implemented in asemiconductor device tester or the like which requires a number oftransmission lines. Additionally, the stabilization of light intensityis hard to perform in the case of transmitting optical pulses at highspeed.

As a solution to the above problem (2), there has been proposed a methodthat does not provide the binary optical signal by the emission andextinction of light by the light emitting device but instead, asdepicted in FIG. 29, drives the light emitting device in a state ofemitting light of a certain level (offset light) at all times andgenerates the binary optical signal according as the light intensityvaries from the offset light. With this method, since the light emittingdevice emits light at all times, the light emission delay time is lessaffected by the temperature change and is not likely to differ from onedevice to another. However, the SN ratio lowers because the differencein light intensity between the binary data “1” and “0”. In addition,since the both pieces of data “1” and “0” of the binary signal isaffected by the light intensity variation, the settlement of theabove-mentioned problem (1) becomes increasingly important.

In a multi-channel transmission module for use in a technical fieldwhich requires a number of transmission line, such as an ATM(Asynchronous Transmission Mode) exchange, there is adopted a methodthat the receiving side extracts only a proper AC component of theoptical signal (AC coupling) and discriminates the binary signal basedon the threshold level set at 0 V as depicted in the lower portion ofFIG. 30. Incidentally, the upper waveform in FIG. 30 shows the electricpulse signal to be transmitted from the transmitting side.

With this method, it is true that timing and data errors can be reducedrelatively easily. But if the ratio between the binary data “1” and “0”inclines toward one particular data value, the threshold level alsoshifts towards that data value, resulting in the occurrence of a timingerror. It is a matter of course that DC-wise data fixed for a long timecannot be discriminated, besides it is also impossible to detect whichdata value continues for a long time.

In other words, according to the above AC coupling method using thethreshold level set at 0 V, when the data value is left in a fixed state(for example, in a state in which no signal is present), a low-levelfluctuation by noise caused in that state will be detected erroneouslyas one of the data values of the binary signal. Thus this method has ashortcoming that the data values of the binary signal need to vary atall times so as to prevent the above-mentioned erroneous detection.Accordingly, this method cannot be employed in a system in which signalsof many different periods are mixed and the data value of the binarysignal inclines heavily toward one particular value (0 or 1), that is,in a system in which the DC component is present and the timing accuracyis regarded as important, for example, as in the case of transmittingsignals between the tester proper and the test head in the semiconductordevice tester.

Further, there has also been proposed such a method as depicted in FIG.31. With this method, a rise edge and a fall edge of a binary electricsignal are detected, then a pulse signal corresponding to the detectionof each edge is generated, followed by a pulse signal having itspolarity inverted, that is, upon detection of the rise edge, a positivepulse signal is generated and a negative pulse signal having itspolarity inverted is continuously generated, thereby to form a pair ofpulses having their polarities opposed to each other (opposite-polaritypulse pair), and upon detection of the fall edge, a negative pulsesignal is generated and a positive pulse signal having its polarityinverted is continuously generated, thereby to form a pair of pulseshaving their polarities opposed to each other (opposite-polarity pulsepair). Based on these opposite-polarity pulse pairs, a semiconductorlaser is driven to create similar opposite-polarity optical pulse pairswhich are transmitted to the receiving side.

With this method, since the transmitted optical pulse pairs are opticalsignals indicating individual timing of the rise and fall of the binaryelectric signal to be transmitted, the receiving side can regenerate theoriginal binary electric signal by receiving the timing-indicatingoptical signals and discriminating between the rise and the fall timingof the original signal. Hence, this method can satisfactorily be appliedeven to the system in which signals of many different periods arepresent and the data value of the binary signal inclines heavily towarda particular value (0 or 1) as in the case of transmitting signalsbetween the tester proper and the test head in the semiconductor devicetester.

That is to say, since the receiving side needs only to receiveopposite-polarity optical pulse pairs as timing signals concerning therise and fall of the original signal, there is no possibility of thethreshold level inclining toward a particular one of the data values,causing an error in timing or in data value. Besides, it is alsopossible to accurately discriminate the DC-wise data value fixed for along time.

In FIG. 32 there is depicted an example of a conventional drivingcircuit which detects the leading and fall edges of a binary electricsignal, then generates an opposite-polarity pulse pair upon detection ofeach edge, and drives a semiconductor laser accordingly.

The driving circuit is provided with: an OR circuit 300 which receivesat one input terminal a binary electric signal to be sent; a firstinverting circuit (an inverter) 301 which inverts the polarity of thebinary electric signal to be sent; a first delay circuit 302 whichdelays the output signal from the inverter 301 by a predetermined timeinterval and applies the delayed signal to the other input terminal ofthe OR circuit 300 and one input terminal of an AND circuit 303; asecond inverting circuit (an inverter) 304 which inverts the polarity ofthe output signal from the delay circuit 302; and second delay circuit305 which delays the output signal from the inverter 304 by apredetermined time interval and applies the delayed signal to the otherinput terminal of the AND circuit 303. Incidentally, the output signalsfrom the OR circuit 300 and the AND circuit 303 are applied, in oppositepolarity, to a semiconductor laser 312.

With the driving circuit of the above construction, it will easily beunderstood that, as shown in FIG. 33, a positive-logic pulse waveform(d) and a negative-logic pulse waveform (e) are generated from leadingand fall edges (a) to (c) of an input binary electric signal and areadded together to form opposite-polarity pulse pairs (f). Based on theopposite-polarity pulse pairs (f), the semiconductor laser 312 is drivento generate pairs of opposite-polarity optical pulses as depicted in thelower part of FIG. 31.

In the generation of the opposite-polarity pulse pairs (f) by adding thepositive-logic pulse waveform (d) and the negative-logic waveform (e)derived from the leading and fall edges of the binary input electricsignal, the polarity inverting portion of each opposite-polarity pulsepair forms a joint between the positive-logic waveform (d) and thenegative-logic waveform (e). Hence, in the conventional driving circuit,the polarity inverting portion of the opposite-polarity pulse pairrequired to be highly accurate may sometimes form a discontinuous edge,incurring the possibility of timing accuracy being impaired.

DISCLOSURE OF THE INVENTION

A first object of the present invention is to provide an opticaltransmission system and method which can obviate the above-describedproblems of the prior art.

A second object of the present invention is to provide an opticaltransmission system and method which permit high-precision, high-speedoptical transmission of a signal even if the signal has a high accuratetiming, an indefinite period, and a DC component.

A third object of the present invention is to provide a semiconductordevice tester which employs the above optical transmission system andmethod.

A fourth object of the present invention is to provide an optical pulsesignal transmitting method which precludes the possibility of jitterbeing caused in the signal to be transmitted to the receiving sideregardless of a temperature change.

A fifth object of the present invention is to provide an optical pulsedetecting method which utilizes the above optical pulse signaltransmitting method.

A sixth object of the present invention is to provide a transmissionwaveform converting method which prevents that the polarity invertingportion of an opposite-polarity pulse pair does not form a discontinuousedge.

A seventh object of the present invention is to provide a lightintensity modulator which prevents that the polarity inverting portionof the opposite-polarity pulse pair does not form a discontinuous edge,and is high in timing accuracy.

An eighth object of the present invention is to provide an opticaltransmission system and a semiconductor device tester which employ thelight intensity modulator.

According to a first aspect of the present invention, there is providedan optical transmission system comprising: in the transmitting sidethereof, first edge detecting means and second edge detecting means fordetecting a rise edge and a fall edge of a signal waveform to betransmitted, respectively; first transmitting pulse generating means forgenerating a first transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the rise edge detection timing by thefirst edge detecting means; second transmitting pulse generating meansfor generating a second transmitting pulse signal constituted by a pairof opposite-polarity pulses, the opposite-polarity pulse pair invertingin their polarities at the point of the fall edge detection timing bythe second edge detecting means; first light intensity modulation meansfor generating a first light intensity modulated signal based on thefirst transmitting pulse signal; and second light intensity modulationmeans for generating a second light intensity modulated signal based onthe second transmitting pulse signal; and in the receiving side thereof,first AC-coupled receiving means for receiving the first light intensitymodulated signal to obtain a first received signal consisting of only anAC component extracted from the first light intensity modulated signal;second AC-coupled receiving means for receiving the second lightintensity modulated signal to obtain a second received signal consistingof only an AC component extracted from the second light intensitymodulated signal; first discriminating means for discriminating the risetiming from the first received signal; second discriminating means fordiscriminating the fall timing from the second received signal; andsignal regenerating means for regenerating the rise edge and fall edgerelating to the signal waveform to be transmitted on the basis of thediscriminated rise timing and the fall timing.

The first discriminating means discriminates, as the rise timing, a timepoint at which the polarity of the first received signal inverts, andthe second discriminating means discriminates, as the fall timing, atime point at which the polarity of the second received signal inverts.

In addition, on the basis of a rise discrimination reference levelserving as a reference for discrimination of the rise timing and a risediscrimination start level providing a timing for starting thediscriminating operation of the rise timing, the first discriminatingmeans is caused to be operative only during a fixed time intervalstarting at a time point when the rise edge of the first received signalintersects the rise discrimination start level, and discriminates, asthe rise timing, a time point when the first received signal intersectsthe rise discrimination reference level during the first discriminatingmeans is operative. On the basis of a fall discrimination referencelevel serving as a reference for discrimination of the fall timing and afall discrimination start level providing a timing for starting thediscriminating operation of the fall timing, the second discriminatingmeans is caused to be operative only during a fixed time intervalstarting at a time point when the fall edge of the second receivedsignal intersects the fall discrimination start level, anddiscriminates, as the fall timing, a time point when the second receivedsignal intersects the fall discrimination reference level during thesecond discriminating means is operative.

The signal regenerating means is constituted by an asynchronous SR(set-reset) flip-flop circuit which is set by the rise timingdiscriminated by the first discriminating means and reset by the falltiming discriminated by the second discriminating means.

According to a second aspect of the present invention, there is providedan optical transmission system comprising: in the transmitting sidethereof, first edge detecting means and second edge detecting means fordetecting a rise edge and a fall edge of a signal waveform to betransmitted, respectively; first transmitting pulse generating means forgenerating a first transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the rise edge detection timing by thefirst edge detecting means; second transmitting pulse generating meansfor generating a second transmitting pulse signal constituted by a pairof opposite-polarity pulses, the opposite-polarity pulse pair invertingin their polarities at the point of the fall edge detection timing bythe second edge detecting means and having the inverted polarities ofthe first transmitting pulse signal; light intensity modulation meansfor generating a light intensity modulated signal based on the firsttransmitting pulse signal and the second transmitting pulse signal; andin the receiving side thereof, AC-coupled receiving means for receivingthe light intensity modulated signal to obtain a received signalconsisting of only an AC component extracted from the light intensitymodulated signal; discriminating means for detecting, from the receivedsignal, signals relating to the first and the second transmitting pulsesignals as well as discriminating the rise timing and the fall timing onthe basis of the relationship of their polarities inverted each other;and signal regenerating means for regenerating the rise edge and thefall edge relating to the signal waveform to be transmitted on the basisof the rise timing and the fall timing.

The discriminating means comprises: a first discrimination circuit fordiscriminating, as the rise timing, a time point when the polarity ofthat signal in the received signals which relates to the firsttransmitting pulse signal inverts from positive to negative; and asecond discrimination circuit for discriminating, as the fall timing, atime point when the polarity of that signal in the received signalswhich relates to the second transmitting pulse signal inverts fromnegative to positive.

In addition, on the basis of a discrimination reference level serving asa reference for discrimination of a timing, a rise discrimination startlevel providing a timing for starting the discriminating operation ofthe rise timing, and a fall discrimination start level providing atiming for starting the discriminating operation of the fall timing, incase of discriminating the rise timing, the first discriminating meansis caused to be enabled only during a fixed time interval from as wellas the second discriminating means is caused to be disabled from a timepoint when the rise edge of the first received signal intersects therise discrimination start level, and during the first discriminatingmeans is enabled, a time point when the received signal intersects thediscrimination reference level is discriminated as the rise timing. Incase of discriminating the fall timing, the second discriminating meansis caused to be enabled only during a fixed time interval from as wellas the first discriminating means is caused to be disabled from a timepoint when the fall edge of the received signal intersects the falldiscrimination start level, and during the second discriminating meansis enabled, a time point when the received signal intersects thediscrimination reference level is discriminated as the fall timing.

The signal regenerating means is constituted by an asynchronous SRflip-flop circuit which is set by the rise timing and reset by the falltiming discriminated by the discriminating means, respectively.

According to a third aspect of the present invention, there is provideda semiconductor device testing apparatus provided with the opticaltransmission system described in any one of claims 1 to 8 and in which atester proper of the testing apparatus for transmitting a binary signaland a test head of the testing apparatus for receiving a binary signalare interconnected via an optical fiber and an optical transmission iseffected between the tester proper and the test head using the opticaltransmission system.

According to a fourth aspect of the present invention, there is provideda method of transmitting an optical signal comprising: a transmittingstep of detecting a rise edge and a fall edge of a signal waveform to betransmitted, respectively, and sending out onto an optical transmissionline timing signals in each of which the detection timing of the edgeforms the boundary for indicating a rise timing or a fall timing; and areceiving step of receiving the timing signals sent out onto the opticaltransmission line and regenerating a rise edge and a fall edge relatingto the signal waveform to be transmitted on the basis of the rise timingand the fall timing of the received timing signals.

According to a fifth aspect of the present invention, there is provideda method of transmitting an optical signal comprising: a first step ofdetecting a rise edge and a fall edge of a signal waveform to betransmitted, respectively; a second step of generating a firsttransmitting pulse signal constituted by a pair of opposite-polaritypulses, the opposite-polarity pulse pair inverting in their polaritiesat the point of the rise edge detection timing as well as generating asecond transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the fall edge detection timing; a thirdstep of generating a first light intensity modulated signal based on thefirst transmitting pulse signal and a second light intensity modulatedsignal based on the second transmitting pulse signal, and sending outthese modulated signals separately onto an optical transmission line; afourth step of receiving the first and the second light intensitymodulated signals individually and obtaining first and second receivedsignals consisting of only AC components respectively extracted from thefirst and the second light intensity modulated signals; and a fifth stepof discriminating a rise timing from the first received signal as wellas discriminating a fall timing from the second received signal, andregenerating a rise edge and a fall edge relating to the signal waveformto be transmitted on the basis of the rise timing and the fall timingthus discriminated.

The discrimination of the rise timing and the fall timing in the fifthstep is performed by discriminating the time point at which the polarityof the first received signal inverts as the rise timing and the timepoint at which the polarity of the second received signal inverts as thefall timing.

In addition, in case of discriminating the rise timing, on the basis ofa rise discrimination reference level serving as a reference fordiscrimination of a rise timing and a rise discrimination start levelproviding a timing for starting the discriminating operation of the risetiming, a time point when the first received signal intersects the risediscrimination reference level within a fixed time interval starting ata time point when the rise edge of the first received signal intersectsthe rise discrimination start level is discriminated as the rise timing.In case of discriminating the fall timing, on the basis of a falldiscrimination reference level serving as a reference for discriminationof a fall timing and a fall discrimination start level providing atiming for starting the discriminating operation of the fall timing, atime point when the second received signal intersects the falldiscrimination reference level within a fixed time interval starting ata time point when the fall edge of the second received signal intersectsthe fall discrimination start level is discriminated as the fall timing.

According to a sixth aspect of the present invention, there is provideda method of transmitting an optical signal comprising: a first step ofdetecting a rise edge and a fall edge from a signal waveform to betransmitted, respectively; a second step of generating a firsttransmitting pulse signal constituted by a pair of opposite-polaritypulses, the opposite-polarity pulse pair inverting in their polaritiesat the point of the rise edge detection timing as well as generating asecond transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the fall edge detection timing andhaving the inverted polarities of the first transmitting pulse signal; athird step of generating a light intensity modulated signal based on thefirst and the second transmitting pulse signals and sending out themodulated signal onto an optical transmission line; a fourth step ofreceiving the light intensity modulated signal to obtain a receivedsignal consisting of only an AC component extracted from the lightintensity modulated signal; and a fifth step of detecting, from thereceived signal, signals relating to the first and the secondtransmitting pulse signals as well as discriminating the rise timing andthe fall timing on the basis of the relationship of their polaritiesinverted each other, and regenerating the rise edge and the fall edgerelating to the signal waveform to be transmitted on the basis of thediscriminated rise timing and the fall timing.

The discrimination of the rise timing and the fall timing in the fifthstep is performed by discriminating, as the rise timing, a time pointwhen the polarity of that signal in the received signals which relatesto the first transmitting pulse signal inverts from positive tonegative; and discriminating, as the fall timing, a time point when thepolarity of that signal in the received signals which relates to thesecond transmitting pulse signal inverts from negative to positive.

In addition, on the basis of a discrimination reference level serving asa reference for discrimination of a timing, a rise discrimination startlevel providing a timing for starting the discriminating operation ofthe rise timing, and a fall discrimination start level providing atiming for starting the discriminating operation of the fall timing, incase of discriminating the rise timing, the rise timing discriminationis enabled only during a fixed time interval from as well as the falltiming discrimination is disabled from a time point when the rise edgeof the received signal intersects the rise discrimination start level,and within the fixed time interval, a time point when the receivedsignal intersects the discrimination reference level is discriminated asthe rise timing. In case of discriminating the fall timing, the falltiming discrimination is enabled only during a fixed time interval fromas well as the rise timing discrimination is disabled from a time pointwhen the fall edge of the received signal intersects the falldiscrimination start level, and within the fixed time interval, a timepoint when the received signal intersects the discrimination referencelevel is discriminated as the fall timing.

According to a seventh aspect of the present invention, there isprovided an optical pulse transmitting method in which an electric pulseis applied to a light emitting device provided at the transmitting side,thereby emitting an optical pulse from the light emitting device, whichis, in turn, transmitted to the receiving side over an opticaltransmission line, and the transmitted optical pulse is converted intoan electric pulse by a light receiving device provided at the receivingside, which is acquired as a received signal, and the method ischaracterized in that: in the transmitting side, a symmetrical waveformsignal which changes symmetrically in positive side and in negative sidewith a DC bias current value as its center is applied as the electricpulse to the light emitting device, thereby maintaining the mean valueof light on the optical transmission line in a constant value.

In the above optical pulse transmitting method according to the seventhaspect of the invention, the point of detection of the symmetricalwaveform signal received at the receiving side is defined to azero-crossing point where the signal intersects the DC bias current.

According to an eighth aspect of the present invention, there isprovided an optical pulse transmitting method in which an electric pulseis applied to a light emitting device provided at the transmitting side,thereby emitting an optical pulse from the light emitting device, whichis, in turn, transmitted to the receiving side over an opticaltransmission line, and the transmitted optical pulse is converted intoan electric pulse by a light receiving device provided at the receivingside, which is acquired as a received signal, and the method ischaracterized in that: in the transmitting side, a symmetrical waveformsignal which changes symmetrically in positive side and negative sidewith a DC bias current value as its center at each of the leading edgeand the trailing edge of the symmetrical waveform signal is applied asthe electric pulse to the light emitting device, thereby maintaining themean value of light on the optical transmission line in a constant valueeven if a pulse having long pulse width in time is transmitted over theoptical transmission line.

In the above optical pulse transmitting method according to the eighthaspect of the invention, the detection point of reception at thereceiving side is defined by the zero-crossing point of either one ofsymmetrical waveform signals which are generated at the leading edge andthe trailing edge thereof.

In addition, a smoothing circuit is provided at the receiving side forgenerating a DC voltage corresponding to the DC bias current value, andthe DC voltage generated from the smoothing circuit is applied to avoltage comparator as a reference voltage thereof, the voltagecomparator having a hysteresis characteristic, and then a potentialvariation that exceeds the hysteresis width of the hysteresischaracteristic with the reference voltage as its center is detected asthe received signal and outputted from the voltage comparator.

According to a ninth aspect of the present invention, there is provideda method of converting a digital input signal to a transmitting waveformconstituted by a pair of opposite-polarity pulses, the opposite-polaritypulse pair inverting in their polarities at a timing of the rise or thefall of the digital input signal, and the method is characterized by thesteps of: generating a first waveform having the same waveform as thatof the input signal, a second waveform delayed by a fixed time intervalfrom the first waveform and having its amplitude as large as twice thatof the first waveform, the waveform of the second waveform havinglogically negative relationship with respect to the digital inputsignal, and a third waveform delayed by a fixed time interval from thesecond waveform and having the same waveform as that of the firstwaveform, from the digital input signal; and superimposing the first,the second and the third waveforms to create the opposite-polarity pulsepair.

According to a tenth aspect of the present invention, there is provideda light intensity modulating apparatus which comprises light emittingmeans and driving means for driving the light emitting means inaccordance with a digital input signal, and the driving means comprises:first current switching means for forming a first current waveform whichhas the same waveform as that of the digital input signal; secondcurrent switching means for forming a second current waveform which isdelayed by a fixed time interval from the first current waveform andhaving its amplitude as large as twice that of the first currentwaveform, the waveform of the second current waveform having logicallynegative relationship with respect to the digital input signal; andthird current switching means for forming a third current waveform whichis delayed by a fixed time interval from the second current waveform andhaving the same waveform as that of the first current waveform, andwherein the driving means drives the light emitting means by a currentwaveform obtained by adding together the first, the second and the thirdcurrent waveforms.

Each of the first to third current switching means comprises a firsttransistor having its base connected to an inverted input terminal towhich the inversion of the digital input signal is applied, and a secondtransistor having its base connected to an input terminal to which thedigital input signal is applied, and the emitters of the first and thesecond transistors of each current switching means are connected incommon to a current source, the collectors of the first transistorsconstituting the first and the third current switching means and thecollector of the second transistor constituting the second currentswitching means are connected in common to a power supply line to form afirst output, the collectors of the second transistors constituting thefirst and the third current switching means and the collector of thefirst transistor constituting the second current switching means areconnected in common to form a second output, and the current source forthe second current switching means is adapted to supply a current aslarge as twice that of the remaining current sources for the remainingcurrent switching means.

In addition, the second current switching means has a first delaycircuit in the input line to the collector of its first transistor and asecond delay circuit in the input line to the collector of its secondtransistor, and the third current switching means has a seriescombination of the first delay circuit and a third delay circuit in theinput line to the collector of its first transistor and a seriescombination of the second delay circuit and a fourth delay circuit inthe input line to the collector of its second transistor.

Further, each of the current sources for the first to third currentswitching means has a current regulating resistor, and the resistancevalues of these current regulating resistors are set such that theresistance values of the current regulating resistors of the currentsources for the first and the third current switching means are equal toeach other, and the resistance value of the current regulating resistorof the current source for the second current switching means is one halfof the resistance value of the current regulating resistor of thecurrent source for each of the first and the third current switchingmeans.

According to an eleventh aspect of the present invention, there isprovided an optical transmission system comprising: in the transmittingside thereof, the light intensity modulating apparatus set forth in anyone of claims 23 to 26; and in the receiving side thereof, AC-coupledreceiving means for receiving a signal modulated in light intensity bythe light intensity modulating apparatus to obtain a received signalconsisting of only an AC component extracted from the light intensitymodulated signal; and signal regenerating means for regenerating, fromthe received signal, the rise timing and the fall timing of the digitalinput signal before transmitted to the receiving side on the basis ofthe relationship of their polarities inverted each other.

According to a twelfth aspect of the present invention, there isprovided a semiconductor device testing apparatus in which a testerproper and a test head are interconnected with each other via an opticalfiber, and comprising: in the tester proper side, the light intensitymodulating apparatus set forth in any one of claims 23 to 26; and in thetest head side, AC-coupled receiving means for receiving a signalmodulated in light intensity by the light intensity modulating apparatusto obtain a received signal consisting of only an AC component extractedfrom the light intensity modulated signal; and signal regenerating meansfor regenerating, from the received signal, the rise timing and the falltiming of the digital input signal before transmitted to the receivingside on the basis of the relationship of their polarities inverted eachother.

According to a thirteenth aspect of the present invention, there isprovided a semiconductor device testing apparatus in which a testerproper and a test head are interconnected with each other via an opticalfiber, and comprising: in the test head side, the light intensitymodulating apparatus set forth in any one of claims 23 to 26; and in thetester proper side, AC-coupled receiving means for receiving a signalmodulated in light intensity by the light intensity modulating apparatusto obtain a received signal consisting of only an AC component extractedfrom the light intensity modulated signal; and signal regenerating meansfor regenerating, from the received signal, the rise timing and the falltiming of the digital input signal before transmitted to the receivingside on the basis of the relationship of their polarities inverted eachother.

In the present invention a bias current, which is constant even duringno-signal period and has a value larger than the threshold value thatprovides a light emission starting point of the light emitting device,is applied thereto, driving it to emit a fixed quantity of light at alltimes. The invention proposes an optical pulse transmitting methodaccording to which the pulse intended to send is added with a pulseopposite in polarity thereto to generate a symmetrical waveform signalwhich goes positive and negative symmetrically about the bias currentand the symmetrical waveform signal is used to drive the light emittingdevice.

Furthermore, the present invention proposes an optical pulse detectingmethod according to which the receiving side utilizes, as a signaldetection threshold value, a voltage corresponding to the bias currentsent from the transmitting side.

Hence, with the use of the optical pulse transmitting method and opticalpulse detecting method according to the present invention, even if theinjected current vs. output light power characteristic of the lightemitting device changes due to a temperature variation at thetransmitting side, the bias current flowing across the light emittingdevice varies accordingly and the variation of the bias current istransmitted as a DC component of light to the receiving side.

Since the receiving side has a construction which regenerates the DCcomponent of light transmitted thereto as a bias voltage and applies itas a reference voltage to a voltage comparator having a hysteresischaracteristic to thereby detect rise and fall transition points of thesymmetrical waveform signal, the point of detection of the symmetricalwaveform signal will not change in time even if the bias voltage varies.

Thus, according to the present invention, even in the case where thelight emitting device at the transmitting side undergoes a temperaturechange and its injected current vs. output light power characteristicvaries accordingly, the point of detection of the pulse at the receivingside does not change. That is, it is possible to prevent the generationof jitter. Hence, the application of the present invention to a deviceof the type transmitting data over the multi channel transmission lineprovides an advantage that no timing error occurs in signals between therespective channels, ensuring properly timed data transmission andreception.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram illustrating the general configuration of anoptical signal transmission system according a first embodiment of thepresent invention.

FIG. 2 is a diagram for explaining the operation of the circuitsdepicted in FIG. 1.

FIG. 3 is a block diagram depicting an example of a concrete circuitconfiguration of the optical signal transmission system shown in FIG. 1.

FIG. 4 is a block diagram depicting the general configuration of asemiconductor device tester utilizing the optical signal transmissionsystem according to the first embodiment of the present invention.

FIGS. 5(a) to (d) are waveform diagrams showing some examples of pairsof pulses which reverse their polarity at rise and fall timings.

FIG. 6 is a block diagram illustrating the general configuration of anoptical signal transmission system according to a second embodiment ofthe present invention.

FIG. 7 is a waveform for explaining the circuit operation of the opticalsignal transmission system depicted in FIG. 6.

FIG. 8 is a block diagram depicted an example of a concrete circuitconfiguration of the optical signal transmission system depicted in FIG.6.

FIG. 9 is a block diagram depicting the general configuration of asemiconductor device tester utilizing the optical signal transmissionsystem according to the second embodiment of the present invention.

FIG. 10 is a circuit diagram showing a concrete example of an opticalpulse transmitter according to a third embodiment of the presentinvention.

FIG. 11 is timing chart for explaining the operation of the opticalpulse transmitter shown in FIG. 10.

FIG. 12 is a circuit diagram depicting an optical pulse detectoraccording to the third embodiment of the present invention.

FIG. 13 is a timing chart for explaining the operation f the opticalpulse detector shown in FIG. 12.

FIG. 14 is a circuit diagram depicting another concrete example of theoptical pulse transmitter according to the third embodiment of thepresent invention.

FIG. 15 is a waveform diagram for explaining the operation of theoptical pulse transmitter depicted in FIG. 14.

FIG. 16 is a circuit diagram depicting still another concrete example ofthe optical pulse transmitter according to the third embodiment of thepresent invention.

FIG. 17 is a timing chart for explaining the operation of the opticalpulse transmitter depicted in FIG. 16.

FIG. 18 is a circuit diagram illustrating a concrete example of a lightintensity modulator according to a fourth embodiment of the presentinvention.

FIG. 19 is a block diagram depicting an example of an opticaltransmission system employing the light intensity modulator shown inFIG. 18.

FIG. 20 is a waveform diagram for explaining the operation of theoptical transmission system shown in FIG. 19.

FIG. 21 is a timing chart for explaining the operation of the lightintensity modulator depicted in FIG. 18.

FIG. 22 is a circuit diagram illustrating another concrete example ofthe light intensity modulator according to the fourth embodiment of thepresent invention.

FIG. 23 is a block diagram illustrating the general configuration of aconventional optical pulse transmitting system.

FIG. 24 is a graph for explaining an example of an injected current vs.Output light power characteristic of a light emitting device shown inFIG. 23.

FIG. 25 is a waveform diagram for explaining the waveform of a pulsetransmitted by the conventional optical pulse transmitting systemdepicted in FIG. 23.

FIG. 26 is a circuit diagram showing an example of a light intensitymodulator used in the conventional optical transmission system.

FIG. 27 is a timing chart for explaining data and timing errorsoccurring in the case of discriminating a binary signal, using a fixedthreshold level.

FIG. 28 is a graph showing the relationship between a light emissiondelay time and light intensity of the light emitting device.

FIG. 29 is a waveform diagram for explaining light intensity modulationfrom offset light.

FIG. 30 is a timing chart for explaining a binary signal discriminatingoperation by an AC-coupled system.

FIG. 31 is a timing chart for explaining a method for opticallytransmitting a binary electric signal by a pair of opposite-polaritypulses corresponding to leading and fall edges of the electric signal.

FIG. 32 is a block diagram showing another example of the lightintensity modulator sued in the conventional optical transmissionsystem.

FIG. 33 is timing chart for explaining the operation of the lightintensity modulator shown in FIG. 32.

BEST MODE FOR CARRYING OUT THE INVENTION

With reference to the accompanying drawings, embodiments of the presentinvention will hereinafter be described in detail.

FIG. 1 is a block diagram schematically illustrates the configuration ofa first embodiment of an optical signal transmission system according tothe present invention. The optical transmission system is made up of atransmitting side T, the receiving side R and an optical fiber 6 thatinterconnects the both sides T and R.

The transmitting side T comprises a rise edge detecting circuit 1, atransmitting pulse generating circuit 2 and a light intensity modulationcircuit 3, and the receiving side R comprises an AC-coupled receivingcircuit 4 and a discrimination circuit 5.

The signal that is transmitted in this optical signal transmissionsystem is not binary data but a timing signal which indicates a point intime when the rise edge of the waveform of a binary signal, that is, theamplitude value (level) of the rise of the transmitting signal exceeds apredetermined amplitude value (level). For brevity sake, the FIG. 1embodiment is shown to have a circuit configuration for transmittingonly the rise edge of the binary signal waveform, but in practice, itincludes a similar circuit configuration for transmitting the fall edgeof the waveform of the binary signal as indicated by the broken lines;that is, the optical signal transmission system has two circuitarrangements for transmitting the leading and fall edges of the binarysignal waveform, respectively.

FIG. 2 is a timing chart for explaining the operations of variouscircuits depicted in FIG. 1; the timing chart shows waveforms, forexample, in the case of detecting the rise edge of the waveform (timingwhen the amplitude value of the rise edge exceeds 50%) and transmittingit. With reference to FIG. 2, the operation of each circuit willhereinafter be described concretely.

The rise edge detecting circuit 1 is usually formed by a logic circuitor the like, which detects the rise edge (timing) of a transmittingwaveform (which means the waveform of the signal to be transmitted) andgenerates a rise signal (a).

Based on the timing of the rise signal from the rise edge detectingcircuit 1, the transmitting pulse generating circuit 2 generates insuccession the corresponding positive pulse signal and a negative pulsesignal opposite in polarity thereto to generate a pair of pulses havingreversed their polarity at the rise timing, which is output as atransmitting pulse signal (b).

It is necessary to use, as the transmitting pulse signal (b), a pulsesignal whose waveform and pulse width are sufficiently smaller than theminimum pulse interval of the waveform of the original transmittingsignal. In other words, the pulse width of the transmitting pulse signal(b) defines the minimum pulse interval of the waveform of the originaltransmitting signal. Incidentally, even when the transmitting pulsesignal (b) becomes such a delayed pulse (e) as indicated by the brokenlines due to some delay in its generation, it can be used as a timingsignal at the receiving side without difficulty if the delay is always afixed and known value.

The light intensity modulation circuit 3 is driven based on thetransmitting pulse signal from the transmitting pulse generating circuit2; that is, a light emitting device (not shown) is driven by aconventional modulation method which modulates the light intensity ofoffset light, outputting as a light intensity signal (c) a pair ofoptical pulses that have reversed their polarity at the timing when theamplitude value of the rise edge of the transmitting pulse signalwaveform exceeds a predetermined value. The light intensity signal (c)is sent over the optical fiber 6 to the receiving side R.

The AC-coupled receiving circuit 4 is a circuit that detects thereceived light intensity signal (c) by the conventional AC-couplingmethod, by which is detected such a received signal as shown at thebottom of FIG. 2. In this instance, since the received light intensitysignal (c) is an optical pulse signal modulated based on thetransmitting pulse signal (b) that reverses its polarity at the risetiming, it has always opposite-polarity pulses. Hence, there is nopossibility that the received signal (d) to be detected contains manypulses inclining toward one particular polarity.

The discrimination circuit 5 discriminates, from the received signal (d)detected by the AC-coupled receiving circuit 4, the rise edge (timing ofthe received signal exceeding a predetermined amplitude value). Todiscriminate the rise timing, the following operation is performed basedon a threshold level L1 (see FIG. 2) with reference to which the timingdiscrimination is made, and a discrimination starting level L2 (see FIG.2) which is preset at a level low enough to permit separation of noiseand signal and provides the timing for the initiation of thediscriminating operation.

At the instant A when the rise edge of the received signal (d) crossesthe discrimination starting level L2, the discrimination circuit 5 isinstantaneously activated, which generates a timing pulse upondiscrimination of the instant B when the received signal crosses thethreshold level L1 within a fixed delay time. That is, thediscrimination circuit 5 remains operative only by a time intervalsubstantially corresponding to the pulse width after the instant A ofthe rise edge having crossed the discrimination starting level L2, anddetermines the instant B of the received signal (d) having crossed thethreshold level L1 as discrimination timing, generating the timingpulse. With this discriminating operation, since the discriminationcircuit 5 does not operate when no pulse is present, it will noterroneously discriminate a low-level fluctuation due to noise as apulse.

Incidentally, since it is evident that the operation of discriminatingthe fall edge from the received signal (d) can similarly be performed,no description will be given thereof.

In the optical signal transmission system of the above configuration,the rise edge can be reproduced by using the timing pulse (the rise-suptiming) available from the rise edge discrimination circuit, forexample, as a set signal of an asynchronous RS (set-reset) flip-flopcircuit, and the fall edge can be reproduced by similarly using thetiming pulse (the fall timing) from the fall edge discrimination circuitas a reset signal of the flip-flop circuit. Hence, these reproducededges can be used to regenerate the original binary transmitting signalwaveform.

As described above, according to the first embodiment, the rise and falltiming of the signal waveform to be transmitted are handled separatelyof each other, then based on the respective timing, a transmitting pulsesignal is generated which is composed of a pair of opposite-polaritypulses that reverse their polarity at each timing, then the transmittingpulse signal is used to intensity-modulate offset light, and theopposite-polarity optical pulse pair is transmitted as a light intensitysignal to the receiving side. The receiving side receives thetransmitted light-intensity signal by the AC-coupled receiving circuit,and only in the presence of the pulse, actuates the discriminationcircuit to detect the rise and fall discrimination timing, theelectrically reproduce the original transmitting signal waveform fromthe rise and fall timing signals available from the discriminationcircuit.

Accordingly, even in the case where many different periods are mixed andthe binary data to be transmitted heavily inclines toward one particularvalue (0 or 1) as in the case of data transmission between the testerproper and the test head of a semiconductor device tester, it ispossible to perform high-speed, high-accuracy optical transmission bytransmitting the rise and the fall timing of the signal waveformseparately of each other.

Next, a description will be given of a concrete circuit arrangement forimplementing the optical signal transmission system described above. Itmust be noted here that the circuit arrangement described below isintended as being merely illustrative of the circuit configuration forimplementing this transmission system and not as limiting the invention.

FIG. 3 illustrates in block form an example of a concrete circuitconfiguration of the optical signal transmission system depicted in FIG.1. The transmitting side T is provided with: a first transmissioncircuit (a rise edge transmission circuit) made up of a rise edgedetecting circuit 11 a, a transmitting pulse generator 12 a and afixed-bias LD driving circuit 13 a; and a second transmission circuit(fall edge transmission circuit) made up of a fall edge detectingcircuit 11 b, a transmitting pulse generator 12 b and a fixed-bias LDdriving circuit 13 b. The receiving side R is provided with: a firstreceiving circuit (a rise edge receiving circuit) made up of anAC-coupled receiving circuit 14 a for receiving an optical signaltransmitted over an optical fiber from the first transmitting circuitand a discrimination circuit 15 a for detecting the rise timing from theAC component of the received signal available from the AC-coupledreceiving circuit 14 b; and a second receiving circuit (a fall edgereceiving circuit) made up of an AC-coupled receiving circuit 14 b forreceiving an optical signal transmitted over an optical fiber from thesecond transmitting circuit and a discrimination circuit 15 b fordetecting the fall timing from the AC component of the received signalavailable from the AC-coupled receiving circuit 14 b. An asynchronous RSflip-flop 16 is provided which is set by the output from thediscrimination circuit 15 a and reset by the output from thediscrimination circuit 15 b.

The leading and fall edge detecting circuits 11 a and 11 b, thetransmitting pulse generators 12 a and 12 b, and the AC-coupledreceiving circuits 14 a and 14 b are identical in construction and inoperation with the corresponding circuits depicted in FIG. 1, and henceno description will be repeated.

The fixed-bias LD driving circuits 13 a and 13 b at the receiving sideare circuits that drive a laser diode (not shown) used as a lightemitting device; they drive the laser diode using, as driving signals,pairs of pulses which are available from the transmitting pulsegenerators 12 a and 12 b and reverse their polarity relative to eachother at the rise and the fall timing, thereby generating alight-intensity modulated signal. For the generation of thelight-intensity modulated signal by the fixed-bias LD driving circuits13 a and 13 b, a conventional method is employed which previouslyapplies a bias current to the laser diode to cause it to emit light(offset light) and modulates the driving current of the laser diode inaccordance with the driving signals.

The discrimination circuit 15 a comprises a comparator 150 a for timingdiscrimination use, a comparator 151 a for determining whether or not tooperate the comparator 150 a, a delay adjustment circuit 152 a anddelay/time constant adjustment circuits 153 a and 154 a. Similarly, thediscrimination circuit 15 b comprises a comparator 150 for timingdiscrimination use, a comparator 151 b for determining whether or not tooperate the comparator 150 b, a delay adjustment circuit 152 b anddelay/time constant adjustment circuits 153 b and 154 b. Since thediscrimination circuits 15 a and 15 b are common in circuitconfiguration with each other, the following description will be givenonly of the discrimination circuit 15 a, omitting a description of thediscrimination circuit 15 b.

In the discrimination circuit 15 a, the output from the AC-coupledreceiving circuit 14 a is branched to one input terminal of thecomparator 151 a and to one input terminal of the comparator 150 a viathe delay adjustment circuit 152 a. The comparator 151 a receives at theother input terminal a discrimination start reference voltage, andcompares it with an input voltage from the AC-coupled receiving circuit14 a, determining whether or not to operate the comparator 150 a. Theoutput from the comparator 151 a is fed via the delay/time constantadjustment circuit 153 a to an enable signal input terminal of thecomparator 150 a to control its operation.

The comparator 150 a has its other input terminal grounded, and comparesthe ground potential and the input voltage fed via the delay adjustmentcircuit 152 a from the AC-coupled receiving circuit 14 a, detecting therise timing. The output from the comparator 150 a is input via thedelay/time constant adjustment circuit 154 a into an S (Set) terminal ofthe asynchronous RS flip-flop 16. Though not described, the asynchronousRS flip-flop 16 is supplied at its R (Reset) terminal with the outputfrom the comparator 150 b of the discrimination circuit 15 b via thedelay/time constant adjustment circuit 154 b.

Next, a description will be made of the operation of the optical signaltransmission system that has the circuit configuration depicted in FIG.3. Upon input of a binary digital signal waveform (a transmitting signalwaveform) into the leading and fall edge detecting circuits 11 a and 11b, the rise edge detecting circuit 11 a detects the rise edge of theinput transmitting signal waveform and the fall edge detecting circuit11 b the fall edge of the input transmitting signal waveform.

The rise edge of the transmitting signal waveform detected by the riseedge detecting circuit 11 a is provided to the transmitting pulsegenerator 12 a, which generates a pair of pulses that reverse theirpolarity relative to each other at the timing of the input rise edge.Similarly, the transmitting pulse generator 12 b generates a pair ofpulses that reverse their polarity relative to each other at the timingof the input fall edge.

The fixed-bias LD driving circuit 13 a drives the laser diode using, asits driving signal, the opposite-polarity pulse pair supplied from thetransmitting pulse generator 12 a. By this, the laser diode drivingcurrent is modulated according to the driving signal, causing the laserdiode to generate a light intensity modulated signal. Likewise, thefixed-bias LD driving circuit 13 b drives the laser diode using, as itsdriving signal, the opposite-polarity pulse pair supplied from thetransmitting pulse generator 12 b. By this, the laser diode drivingcurrent is modulated according to the driving signal, causing the laserdiode to generate a light intensity modulated signal.

The light intensity modulated signals available from the laser diode,which correspond to its driving by the fixed-bias LD driving circuits 13a and 13 b, are sent over the optical fibers to the transmitting side,wherein they are received by the corresponding AC-coupled receivingcircuits 14 a and 14 b, respectively.

Upon receiving the light intensity modulated signal, the AC-coupledreceiving circuits 14 a and 14 b each convert only the AC component ofthe received light intensity modulated signal into an electric signal.By this, the original opposite-polarity pulse pair is generated, whichis output as the received signal. The received signals from theAC-coupled receiving circuits 14 a and 14 b are input into thediscrimination circuits 15 a and 15 b.

The received signal input into the discrimination circuit 15 a is fedfirst to the comparator 151 a. The comparator 151 a compares the voltageof the input received signal and the discrimination start referencevoltage, thereby detecting the input of a pulse and outputting apulse-like signal. The pulse-like output signal is processed by thedelay/time constant adjustment circuit 153 a into a signal of asufficient pulse width, which is applied to the enable signal inputterminal of the comparator 150 a. Supplied with the enable signal, thecomparator 150 a starts its operation, then discriminates the centerportion of the opposite-polarity pulse pair (the received signal), thatis, the timing of its reversal of polarity, and outputs a pulse-likesignal (a timing signal) indicating the discriminated timing.

In the discrimination circuit 15 a, the delay times of theopposite-polarity pulse pair (the received signal) by the input paths tothe comparators 150 a and 151 a are adjusted by the delay adjustmentcircuit 152 a and the delay/time constant adjustment circuit 153 a sothat the comparator 151 a starts its operation earlier than the arrivalof the opposite-polarity pulse pair (the received signal) at the oneinput terminal of the comparator 150 a.

The timing signal output from the comparator 150 a is processed by thedelay/time constant adjustment circuit 154 a into a signal of asufficient pulse width, which is input into the S (Set) terminal of theasynchronous RS flip-flop 16.

As is the case with the above, the received signal fed into thediscrimination circuit 15 b is applied to the comparator 151 b. Thecomparator 151 b compares the voltage of the input received signal andthe discrimination start reference voltage, thereby detecting the inputof a pulse and outputting a pulse-like signal. The pulse-like outputsignal is processed by the delay/time constant adjustment circuit 153 binto a signal of a sufficient pulse width, which is applied to theenable signal input terminal of the comparator 150 b. Supplied with theenable signal, the comparator 150 b starts its operation, thendiscriminates the center position of the opposite-polarity pulse pair(the received signal), that is, the timing of the reversal of polarity,and outputs a pulse-like signal indicating the discriminated timing (atiming signal).

In the discrimination circuit 15 b, the delay times of theopposite-polarity pulse pair (the received signal) by the input paths tothe comparators 150 b and 151 b are adjusted by the delay adjustmentcircuit 152 b and the delay/time constant adjustment circuit 153 b sothat the comparator 151 b starts its operation prior to the arrival ofthe opposite-polarity pulse pair (the received signal) at the one inputterminal of the comparator 150 b.

The timing signal output from the comparator 150 b is processed by thedelay/time constant adjustment circuit 154 b into a signal of asufficient pulse width, which is input into the R (Reset) terminal ofthe asynchronous RS flip-flop 16.

When thus supplied with the set signal and the reset signal from thediscrimination circuits 15 a and 15 b, the asynchronous RS flip-flop 16responds to the input thereto of the set signal to go to the logic “1”state to thereby reproduce the rise edge of the original transmittingsignal waveform, and responds to the input thereto of the reset signalto go to the logic “0” state to thereby reproduce the fall edge of theoriginal transmitting signal waveform. This circuit compensates for anunnecessary time difference between the two transmission and processinglines for the rise edge timing and the fall edge timing transmission bythe delay/time constant adjustment circuits 154 a and 154 b—this ensuresthat the transmitting signal waveform reproduced by the asynchronous RSflip-flop 16 becomes the binary signal of the same polarity and timingas those of the signal prior to its transmission.

The circuit configuration of the optical signal transmission systemdescribed above is applicable to a semiconductor device tester as well.Turning next to FIGS. 4 and 5, a semiconductor device tester using theoptical signal transmission system of the above circuit configurationwill be described concretely.

As depicted in FIG. 4, the tester proper has a transmitting partcomposed of the leading and fall edge detecting circuits 11 a and 11 b(not shown), the transmitting pulse generators 12 a and 12 b and thefixed bias LD driving circuits 14 a and 14 b, and the test head has areceiving part composed of the AC-coupled receiving circuits 14 a and 14b, the discrimination circuits 15 a and 15 b and the asynchronous RSflip-flop 16. The transmitting part and the receiving part areinterconnected using optical fibers.

With this arrangement, a signal in which many periods are mixed and thebinary data to be sent heavily inclines toward one particular value (0or 1)—which is transmitted between the tester proper and the test headof the semiconductor device tester—is transmitted from the transmittingpart after conversion to transmitting pulse signals composed ofopposite-polarity pulse pairs which indicate the timing at which onlythe leading and fall edges of the signal waveform cross thepredetermined levels, and the receiving part electrically reproduces theoriginal transmitting signal waveform from the discriminated rise andfall timing; hence, the original signal can be regenerated withoutcausing polarity and timing errors.

In the semiconductor device tester, since the binary signal available inthe tester proper is divided into the leading and fall edges, it ispossible to omit the leading and fall edge detecting circuits 11 a and11 b as not shown in FIG. 4, permitting reduction of the cost of theentire system.

In the optical signal transmission system of the first embodimentdescribed above, the opposite-polarity pulse pairs indicative of thetiming at which the leading and fall edges of the transmitting signalwaveform cross the predetermined levels are not limited specifically tothe pulse pairs described above and shown. For example, the rise timingpulse pair and the fall timing pulse pair may be those whose polaritybear such relationships as depicted in FIGS. 5(a) to (d). Incidentally,FIG. 5(a) shows the same opposite-polarity pulse pairs as those used inthe first embodiment described above.

In the optical signal transmission system of the first embodimentdescribed above, the rise and the fall timing of the signal waveformdesired to transmit are handled separately and two transmission pathsare provided over which to transmit the opposite-polarity pulse pairsindicating the rise and the fall timing, respectively, but thetransmission paths between the transmitting and the receiving side canbe reduced to one by making provision to enable such opposite-polaritypulse pairs to be discriminated as pulse pairs that are opposite inpolarity to each other as shown in FIGS. 5(b) and ©.

Referring now to FIGS. 6 to 8, an optical signal transmission systemaccording to a second embodiment of the present invention will bedescribed which employs one transmission line between the transmittingand the receiving side.

FIG. 6 illustrates in block form a general configuration of the opticalsignal transmission system which employs one transmission line accordingto the second embodiment of the present invention. The optical signaltransmission system of this embodiment has a configuration in which thetransmitting side T is provided with leading and fall edge detectingcircuits 21 a and 21 b, transmitting pulse generators 22 a and 22 b anda light intensity modulation circuit 23, and the receiving side R isprovided with an AC-coupled receiving circuit 24 and discriminationcircuits 25 a and 25 b. The transmitting side T and the receiving side Rare interconnected via one optical fiber 26.

The optical signal transmission system of the above configurationbasically common in operation to the system of the first embodimentexcept the opposite-polarity pulse pair generating operations by thetransmitting pulse generators 22 a and 22 b and the rise and fall timingdetecting operations by the discrimination circuits 25 a and 25 b.

FIG. 7 is a waveform diagram for explaining the operation of the opticalsignal transmission system depicted in FIG. 6. Referring next to FIG. 7,the operation of each circuit will be described concretely.

The transmitting pulse generators 22 a and 22 b generate transmittingpulse signals (c) and (d) composed of pulse pairs that reverse theirpolarity at the timing of rise and fall signals (a) and (b) which aredetected by the leading and fall edge detecting circuits 21 a and 21 b,respectively. In this embodiment, the transmitting pulse signal (c)available from the transmitting pulse generator 22 a and thetransmitting pulse signal (d) from the transmitting pulse generator 22 bare opposite in polarity to each other, allowing ease in discriminatingbetween the pulse signals indicating the rise and the fall timing,respectively.

The shapes and pulse widths of these transmitting pulse signals areindependent of the original transmitting signal waveform and are fixed,and their pulse widths are chosen such that they are sufficientlysmaller than the minimum pulse interval of the original transmittingsignal waveform and do not overlap the minimum pulse width of theoriginal transmitting signal waveform. In other words, the width of eachtransmitting pulse signal limits the minimum pulse interval and minimumpulse width of a transmittable signal waveform.

The light intensity modulation circuit 23 and the AC-coupled receivingcircuit 24 are identical in construction with those depicted in FIG. 1,but in this embodiment the light intensity modulation circuit 23receives the transmitting pulse signals from the transmitting pulsegenerators 22 a and 22 b, and outputs an opposite-polarity optical pulsepair (a light intensity signal (e)) based on the inputs thereto, whereasthe AC-coupled receiving circuit 4 receives the light intensity signalsent thereto and outputs a received signal (f).

The discrimination circuit 25 a discriminates the rise timing from thereceived signal (f) detected by the AC-coupled receiving circuit 4, andthe discrimination circuit 25 b discriminates the fall timing from thereceived signal (f). These discrimination circuits 25 a and 25 bperforms such discrimination operations as described below, based on athreshold level L1 with reference to which timing discrimination ismade, a rise edge discrimination start level L2 and a fall edgediscrimination start level L3 set sufficiently low though to such anextent as to permit separation between noise and signal.

In the discrimination of the rise timing, at the instant A when the riseedge of the received signal (f) crosses the discrimination start levelL2, the discrimination circuit 25 a is instantaneously actuated and atthe same time the discrimination circuit 25 b is instantaneously madeinoperative, and the instant B when the waveform of the received signal(f) crosses the threshold level L1 within a fixed delay time isdiscriminated by the discrimination circuit 25 a, which is caused togenerate a timing pulse at this instant B.

In the discrimination of the fall timing, at the instant C when the falledge of the received signal (f) crosses the fall edge discriminationstart level L3, the discrimination circuit 25 b is instantaneouslyactuated and at the same time the discrimination circuit 25 a isinstantaneously made inoperative, and the instant D when the waveform ofthe received signal (f) crosses the threshold level L1 within a fixeddelay time is discriminated by the discrimination circuit 25 b, which iscaused to generate a timing pulse at this instant D.

According to the above discrimination operation, since thediscrimination circuit 25 b remains inoperative within a fixed period oftime after the instant A when the rise edge crossed the discriminationstart level L2, there is no possibility that the discrimination circuit25 b erroneously discriminates the instant C′ when the waveform of thereceived signal (f) crosses the discrimination level L1 after thediscrimination circuit 25 a discriminated the instant B of the waveformof the received signal (f) having crossed the discrimination level L3.

Similarly, since the discrimination circuit 25 a remains inoperativewithin a fixed period of time after the instant C when the fall edgecrossed the discrimination start level L3, there is no possibility thatthe discrimination circuit 25 a erroneously discriminates the instant A′when the waveform of the received signal (f) crosses the discriminationlevel L1 after the discrimination circuit 25 b discriminated the instantD of the waveform of the received signal (f) having crossed thediscrimination level L3.

During the no-pulse (Ac component) period of the received signal (f),the discrimination circuits 25 a and 25 b are both out of operation, sothat there is no likelihood of a low-level fluctuation by noise beingerroneously discriminated as a pulse.

In the optical signal transmission system described above, the rise edgecan be regenerated by using the timing pulse (the rise timing) availablefrom the discrimination circuit 25 a, for example, as a set signal of anasynchronous RS flip-flop circuit, and the fall edge can be regeneratedby using the timing pulse (fall timing) available from the fall edgediscrimination circuit 25 b as a reset signal of the asynchronous RSflip-flop circuit. By this, the original binary transmitting signalwaveform can be regenerated.

Next, a description will be given of a concrete circuit configurationfor implementing the optical signal transmission system according to thesecond embodiment described above. It must be noted here that thecircuit configuration described below is intended as being merelyillustrative of the circuit configuration for implementing thistransmission system and should not be construed as limiting theconstruction of the invention.

FIG. 8 illustrates in block form an example of a concrete circuitconfiguration of the optical signal transmission system depicted in FIG.6. In this concrete example, there are provided at the receiving sideleading and fall edge detecting circuits 31 a and 31 b which detect theleading and fall edges of the transmitting signal waveform, transmittingpulse generators 32 a and 32 b into which the output signals from theedge detecting circuits 31 a and 31 b are input, and a fixed-bias LDdriving circuit 33 which uses the output signals from the transmittingpulse generators 32 a and 32 b as LD driving signals.

At the receiving side there are provided an AC-coupled receiving circuit34, discrimination circuits 35 a and 35 b into which the output from theAC-coupled receiving circuit 34 is input, and an asynchronous RSflip-flop 36 which is set by the output signal from the discriminationcircuit 35 a and reset by the output signal from the discriminationcircuit 35 b. The transmitting side and the receiving side areinterconnected via an optical fiber.

The leading and fall edge detecting circuits 31 a and 31 b, thetransmitting pulse generators 32 a and 32 b, and the AC-coupledreceiving circuit 34 are identical in construction and in operation withthose depicted in FIG. 6, and hence no description will be repeated.

The fixed-bias LD driving circuit 33 is one that drives a laser diode(not shown) which is a light emitting device; they drive the laser diodeusing, as driving signals, pairs of pulses which are available from thetransmitting pulse generators 12 a and 12 b and reverse their polarityrelative to each other at the rise and the fall timing, therebygenerating a light-intensity modulated signal. For the generation of thelight-intensity modulated signal by the fixed-bias LD driving circuit33, a conventional method is employed which previously applies a biascurrent to the laser diode to cause it to emit light (offset light) andmodulates the driving current of the laser diode in accordance with thedriving signal.

The discrimination circuit 35 a comprises a comparator 350 a for timingdiscrimination use, a comparator 351 a for determining whether or not tooperate the comparator 350 a, a delay adjustment circuit 352 a anddelay/time constant adjustment circuits 353 a, 354 a and 355 a.Similarly, the discrimination circuit 35 b comprises a comparator 350 bfor timing discrimination use, a comparator 351 b for determiningwhether or not to operate the comparator 350 b, a delay adjustmentcircuit 352 b and delay/time constant adjustment circuits 353 b, 354 band 355 b.

In the discrimination circuit 35 a, the output from the AC-coupledreceiving circuit 34 is branched to one input terminal of the comparator351 a and to one input terminal of the comparator 350 a via the delayadjustment circuit 352 a. The comparator 351 a receives at the otherinput terminal a rise edge discrimination start reference voltage, andcompares it with an input voltage from the AC-coupled receiving circuit34, determining whether or not to operate the comparator 350 a.

The output from the comparator 351 a is fed via the delay/time constantadjustment circuit 353 a to an enable signal input terminal of thecomparator 350 a and to a disable signal input terminal of thecomparator 350 a via the delay/time constant adjustment circuit 354 a sothat the operation of the comparators 350 a and 351 a can be controlled.

The comparator 350 a has its other input terminal grounded, and comparesthe ground potential and the input voltage fed from the AC-coupledreceiving circuit 34, detecting the rise timing. The output signal fromthe comparator 350 a is input via the delay/time constant adjustmentcircuit 355 a into an S (Set) terminal of the asynchronous RS flip-flop36.

In the discrimination circuit 35 b, the output from the AC-coupledreceiving circuit 34 is similarly branched to one input terminal of thecomparator 351 b and to one input terminal of the comparator 350 b viathe delay adjustment circuit 352 b. The comparator 351 b receives at theother input terminal a fall edge discrimination start reference voltage,and compares it with an input voltage from the AC-coupled receivingcircuit 34, determining whether or not to operate the comparator 350 b.

The output from the comparator 351 b is fed via the delay/time constantadjustment circuit 353 b to an enable signal input terminal of thecomparator 350 b and to a disable signal input terminal of thecomparator 350 b via the delay/time constant adjustment circuit 354 b sothat the operation of the comparators 350 b and 351 b can be controlled.

The comparator 350 b has its other input terminal grounded, and comparesthe ground potential and the input voltage fed from the AC-coupledreceiving circuit 34, detecting the fall timing. The output signal fromthe comparator 350 b is input via the delay/time constant adjustmentcircuit 355 b into an R (Reset) terminal of the asynchronous RSflip-flop 36.

Next, a description will be made of the operation of the optical signaltransmission system according to the second embodiment. Upon input of abinary digital signal waveform (a transmitting signal waveform) into theleading and fall edge detecting circuits 31 a and 31 b, the rise edgedetecting circuit 31 a detects the rise edge of the input transmittingsignal waveform and the fall edge detecting circuit 31 b the fall edgeof the input transmitting signal waveform.

The rise edge of the transmitting signal waveform detected by the riseedge detecting circuit 31 a is provided to the transmitting pulsegenerator 32 a, which generates a pair of pulses that reverse theirpolarity relative to each other at the timing of the input rise edge.Similarly, the transmitting pulse generator 32 b generates a pair ofpulses that reverse their polarity relative to each other at the timingof the input fall edge.

The fixed-bias LD driving circuit 33 drives the laser diode by theopposite-polarity pulse pairs supplied from the transmitting pulsegenerators 32 a and 32 b, generating a light intensity modulated signalcomposed of the opposite-polarity optical pulse pairs. This lightintensity modulated signal is sent over the optical fiber to thereceiving side, wherein it is received by the AC-coupled receivingcircuit 34.

Upon receiving the light intensity modulated signal, the AC-coupledreceiving circuit 34 converts only the AC component of the receivedlight intensity modulated signal into an electric signal. By this, theoriginal opposite-polarity pulse pair is generated, which is output asthe received signal. The received signal from the AC-coupled receivingcircuit 34 is branched to the discrimination circuits 35 a and 35 b.

The received signal input into the discrimination circuit 35 a is fedfirst to the comparator 351 a. The comparator 351 a compares the voltageof the input received signal and the rise edge discrimination startreference voltage, thereby detecting the input of a pulse and outputtinga pulse-like signal. The pulse-like output signal is branched to thedelay/time constant adjustment circuits 353 a and 354 a, wherein theinput signals thereto are processed into signals of sufficient pulsewidths, which are applied to the enable signal input terminal of thecomparator 350 a and the disable signal input terminal of the comparator351 b, respectively.

Supplied with the enable signal, the comparator 150 a starts itsoperation, then discriminates the center portion of theopposite-polarity pulse pair (the received signal), that is, the timingof its reversal of polarity, and outputs a pulse-like signal (a timingsignal) indicating the discriminated timing. On the other hand, thecomparator 351 a is disabled by the disable signal for a fixed period oftime, preventing the comparator 350 a from malfunction.

In the discrimination circuit 35 a, the delay times of theopposite-polarity pulse pair (the received signal) by the input paths tothe comparators 350 a and 351 a are adjusted by the delay adjustmentcircuit 352 a and the delay/time constant adjustment circuit 353 a sothat the comparator 351 a starts its operation prior to the arrival ofthe opposite-polarity pulse pair (the received signal) at the one inputterminal of the comparator 350 a; besides, the delay time of the inputpath to the comparator 351 b is adjusted by the delay/time constantadjustment circuit 354 a so that the comparator 351 b is disabled priorto the arrival of a signal subsequent to the above-mentionedopposite-polarity pulse pair.

The timing signal output from the comparator 350 a is processed by thedelay/time constant adjustment circuit 355 a into a signal of asufficient pulse width, which is input into the S (Set) terminal of theasynchronous RS flip-flop 36.

As is the case with the above, the received signal fed into thediscrimination circuit 35 b is applied to the comparator 351 b. Thecomparator 351 b compares the voltage of the input received signal andthe fall edge discrimination start reference voltage, thereby detectingthe input of a pulse and outputting a pulse-like signal. The pulse-likeoutput signal is branched to the delay/time constant adjustment circuits353 b and 354 b, wherein the input signals thereto are processed intosignals of sufficient pulse widths, which are applied to the enablesignal input terminal of the comparator 350 b and the disable signalinput terminal of the comparator 351 a, respectively.

Supplied with the enable signal, the comparator 350 b starts itsoperation, then discriminates the center portion of theopposite-polarity pulse pair (the received signal), that is, the timingof its reversal of polarity, and outputs a pulse-like signal (a timingsignal) indicating the discriminated timing. On the other hand, thecomparator 351 a is disabled by the disable signal for a fixed period oftime, preventing the comparator 350 a from malfunction.

In the discrimination circuit 35 b, the delay times of theopposite-polarity pulse pair (the received signal) by the input paths tothe comparators 350 b and 351 b are adjusted by the delay adjustmentcircuit 352 b and the delay/time constant adjustment circuit 353 b sothat the comparator 351 b starts its operation prior to the arrival ofthe opposite-polarity pulse pair (the received signal) at the one inputterminal of the comparator 350 b; besides, the delay time of the inputpath to the comparator 351 b is adjusted by the delay/time constantadjustment circuit 354 b so that the comparator 351 a is disabled priorto the arrival of a signal subsequent to the above-mentionedopposite-polarity pulse pair.

The timing signal output from the comparator 350 b is processed by thedelay/time constant adjustment circuit 354 b into a signal of asufficient pulse width, which is input into the R (Reset) terminal ofthe asynchronous RS flip-flop 36.

When thus supplied with the set signal and the reset signal from thediscrimination circuits 35 a and 35 b, the asynchronous RS flip-flop 36responds to the input thereto of the set signal to go to the logic “1”state to thereby reproduce the rise edge of the original transmittingsignal waveform, and responds to the input thereto of the reset signalto go to the logic “0” state to thereby reproduce the fall edge of theoriginal transmitting signal waveform. This circuit compensates for anunnecessary time difference between the two transmission and processinglines for the rise edge timing and the fall edge timing transmission bythe delay/time constant adjustment circuits 355 a and 355 b—this ensuresthat the transmitting signal waveform reproduced by the asynchronous RSflip-flop 36 becomes the binary signal of the same polarity and timingas those of the signal prior to its transmission.

In the application of the above-described system of the secondembodiment to a high-speed binary signal transmission, comparators andother circuit elements are required to be faster in operation than thoseused in an electric transmission system and those used in theabove-described first embodiment.

The circuit configuration of the optical signal transmission systemaccording to the second embodiment described above is applicable to asemiconductor device tester as well. Turning next to FIG. 9, asemiconductor device tester using the optical signal transmission systemof the above circuit configuration will be described concretely.

As depicted in FIG. 9, the tester proper has a transmitting partcomposed of the leading and fall edge detecting circuits 31 a and 31 b(not shown), the transmitting pulse generators 32 a and 32 b and thefixed bias LD driving circuit 33, and the test head has a receiving partcomposed of the AC-coupled receiving circuit 34, the discriminationcircuits 35 a and 35 b and the asynchronous RS flip-flop 36. Thetransmitting part and the receiving part are interconnected usingoptical fibers.

With this arrangement, a signal in which many periods are mixed and thebinary data to be sent heavily inclines toward one particular value (0or 1)—which is transmitted between the tester proper and the test headof the semiconductor device tester—is transmitted from the transmittingpart after conversion to transmitting pulse signals composed ofopposite-polarity pulse pairs which indicate the timing at which onlythe leading and fall edges of the signal waveform cross thepredetermined levels, and the receiving part electrically reproduces theoriginal transmitting signal waveform from the discriminated rise andfall timing; hence, the original signal can be regenerated withoutcausing polarity and timing errors.

In the semiconductor device tester, since the binary signal available inthe tester proper is divided into the leading and fall edges, it ispossible to omit the leading and fall edge detecting circuits 31 a and31 b as not shown in FIG. 9, permitting reduction of the cost of theentire system.

Next, a third embodiment will be described with reference to thedrawings associated therewith.

FIG. 10 depicts a concrete example of an optical pulse transmittingdevice embodying the optical signal transmitting method according to thepresent invention. In this example, too, a light emitting device LD likea laser diode is used, and constant-current circuits 110A, 110B and 110Care connected to the light emitting device LD. The constant-currentcircuits 110A and 110B are shown to be connected to the light emittingdevice LD via current switches 111A and 111B, respectively, and theconstant-current circuit 110C is shown to be connected directly to thelight emitting device LD. Accordingly, the light emitting device LD isalways supplied with a current lc flowing across the constant-currentcircuit 110C.

The current switches 111A and 111B are turned ON by H logic (a highlogical level) provided thereto as a control voltage and turned OFF by Llogic (a low logical level). The current switch 111A has its controlterminal connected directly to an input terminal IN. The current switch111B has its control terminal connected to the input terminal IN via aseries circuit composed of an inverter 112 and a delay element 113.

In the above construction, such a positive pulse P as depicted in FIG.11A is applied to the input terminal IN. For convenience of description,let it be assumed that the delay time Td of the delay element 113 andthe pulse width Pw of the pulse P bear a relationship that Pw=Td.

When the pulse P is applied to the input terminal IN, the current switch111A is immediately turned ON as depicted in FIG. 11B. Since the currentswitch 111B is supplied with the pulse P after it is inverted by theinverter 112 and delayed by the delay element 113, the current switch111B is always held in the ON state, and at the rise timing of the inputpulse P it is held in the OFF state by the time interval of the pulsewidth Td.

Hence, the light emitting device LD is supplied with such currents asdepicted in FIG. 11D. That is, during the no-signal period, the sumI_(b)+I_(c) of currents I_(b) and I_(c) flowing across theconstant-current circuits 110B and 110C is injected as a bias current;while the pulse P is applied to the input terminal IN, the sumI_(a)+I_(b)+I_(c) of the currents I_(a), I_(b) and I_(c) flowing acrossall the constant-current circuits 110A to 110C is injected; and at thetiming after the fall of the pulse P the current switches 111A and 111Bare both turned OFF, and consequently, at this timing only the currentI_(c) flowing across the constant-current circuit 110C is injected.

Upon expiration of the pulse duration Td of the pulse input thereinto,the current switch 111B is returned to the ON state. Consequently, thecurrent I_(b)+I_(c) is injected again into the light emitting device LD.

Thus, in the concrete example shown in FIG. 10, the bias current that isinjected into the light emitting device LD is I_(b)+I_(c), and thecurrents I_(a)+I_(b)+I_(c) and I_(c), which go positive and negativeabout the bias current I_(b)+I_(c), respectively, are injected to thelight emitting device LD. The intensity of light emitted from the lightemitting device LD takes the same waveform as the current waveformdepicted in FIG. 11D. Assume that the current I_(c) is larger than athreshold current I_(ON) with which the light emitting device LD startsemission of light as depicted in FIG. 11D.

In FIG. 12 there is shown a specific operative example of a detectingcircuit that is provided in a receiving device 102. In this example thedetecting circuit 107 is shown to be made up of a current-to-voltageconverting circuit 107A for converting the received optical currentsignal from a photodetector PD into a voltage signal, a smoothingcircuit 107B and a voltage comparator 107C that has a hysteresis.

The current-to-voltage converting circuit 107A may be formed by anoperational amplifier A and a feedback resistor R. The smoothing circuit107B may be formed by a time constant circuit that has a time constantsufficiently larger than the pulse width Pw of the pulse P transmitted.To a non-inverting input terminal of the voltage comparator 107C isprovided via the smoothing circuit 107B a reference voltagecorresponding to the bias value sent from the transmitting side. Theoutput signal from the current-to-voltage converting circuit 107A isprovided intact to an inverting input terminal of the voltage comparator107C.

With such an arrangement, the smoothing circuit 107B is always suppliedwith a reference voltage that corresponds to the bias currentI_(b)+I_(c) which is sent from the transmitting side. Accordingly, thevoltage comparator 107C provides either one of H logic and L logic to anoutput terminal 107D, depending on whether the voltage applied to theinverting input terminal is higher or lower than the reference voltageapplied to the non-inverting input terminal. Further, the voltagecomparator 107C has a hysteresis characteristic between the two inputterminals; hence, even if the voltages at the both input terminals areequal to the reference voltage, the output at the terminal 107D is keptL-logic or H-logic, depending on whether the input voltage at thenon-inverting input terminal restored to the same reference voltage fromthe state in which the input voltage was further negative or positivethan the voltage fed to the inverting input terminal.

Now, assuming that a received optical current I_(P) shown in FIG. 13A isreceived by the receiving device depicted in FIG. 12, thecurrent-to-voltage converting circuit 107A outputs a bias voltage V_(B)and a pulse waveform V_(P) shown in FIG. 13B. Even if supplied with thepulse waveform V_(P), the smoothing circuit 107B smoothes it andcontinues to apply to the non-inverting input terminal of the voltagecomparator 107C the reference voltage that matches the bias voltageV_(B). Hence, when the pulse waveform V_(P) is fed to the invertinginput terminal of the voltage comparator 107C and its voltage exceedsthe hysteresis width on the positive side, the voltage comparator 107Cprovides H logic at the output terminal 107D as depicted in FIG. 13C.

When the pulse waveform V_(P) at the inverting input terminal goesacross the bias voltage V_(B) further to the negative than thehysteresis width on the negative side, the output terminal 107D of thevoltage comparator 107C goes to the L-logic level. Accordingly, thevoltage comparator 107C provides to the output terminal 107D the pulseP_(V) depicted in FIG. 13C. In this case, even if the value of the biascurrent I_(b)+I_(c) (which is the same as the bias voltage V_(B)) of thereceived optical current signal I_(P) varies, the rise timing of thispulse P_(V) remains unchanged because the rise timing is determineddepending on whether or not the pulse waveform V_(P) at the invertinginput terminal of the voltage comparator 107C exceeds the hysteresiswidth on the positive side. As a result, even if the injected currentvs. output light power characteristic of the light emitting device LDvaries due to a temperature change at the transmitting side, thedetection timing of the pulse signal transmitted does not change. Hence,a jitter-free signal can be transmitted and received. In the pulsewaveform V_(P) that is output from the current-to-voltage convertingcircuit 107A, the zero-crossing point from positive to negative (or fromnegative to positive) is the fastest point of crossing the bias voltageV_(B). It is considered, therefore, that the zero-crossing point is theposition where the point of timing detection undergoes the leastvariations in the direction of the time axis. Consequently, the falledge position TO of the pulse waveform V_(P) corresponding to thezero-crossing point, that is, which is output from the voltagecomparator 107C, is used as the point of signal detection in practice.

FIG. 14 illustrates another specific operative example of the opticalpulse transmitting device. This example is shown to have a circuitconfiguration which is equipped with a function of rendering inputpulses into optical pulses of a fixed pulse width (which function iscommonly called a pulser), in addition to the function of generatingoptical pulses which go positive and negative across the bias value asin the FIG. 10 example.

An electric pulse P input into the input terminal IN is fed directly tothe one input terminal of a NOR gate 114, and at the same time it isapplied to the other input terminal thereof via a series circuitcomposed of an inverter 112 and a delay element 113. Furthermore, theelectric pulse P is supplied to the one input terminal of a NAND gate115 via the series circuit of the inverter 112 and the delay element113, and the signal delayed by an inverter 116 and a delay element 117is fed to the other input terminal of the NAND gate 115. The outputsignal from the NOR gate 114 is provided as a control signal to acurrent switch 111A, and the output signal from the NAND gate 115 issimilarly applied as a control signal to a current switch 111B.

Now, a description will be given, with reference to FIG. 15, of theoperation of this example on the assumption that the pulse width Pw ofthe pulse P input into the input terminal IN is longer than the delaytime Td by the delay elements 113 and 117, that is, Pw>Td.

FIG. 15A shows the pulse P fed to the input terminal IN. FIG. 15B showsthe waveform of a pulse P_(B) that is applied to the one input terminalof each of the NOR gate 114 and the NAND gate 115 via the inverter 112and the delay element 113. The NOR gate 114 provides to its output apulse P_(D) depicted in FIG. 15D, and while the pulse P_(D) is at theH-logic level, the current switch 111A is held in the ON state. The timefor which the current switch 111A is controlled to remain in the ONstate is defined to be equal to the delay time Td of the delay element113.

FIG. 15C shows the waveform of a pulse P_(C) that is supplied to theother input terminal of the NAND gate 115 via the inverter 116 and thedelay element 117. Since the NAND gate 115 is supplied with the pulseP_(B) depicted in FIG. 15B and the pulse P_(C) depicted in FIG. 15C, itprovides to its output a pulse P_(E) depicted in FIG. 15E. That is, theNAND gate 115 always provides the H-logic output, and hence the currentswitch 111B is controlled to be in the ON state at all times. Since thepulse P_(E) is output as a negative-going pulse signal, the currentswitch 111B is turned ON only while the pulse P_(E) is at the L-logicstate.

Consequently, as shown in FIG. 15F, the current I that flows to thelight emitting device LD is I_(a)+I_(b)+I_(c) above I_(b)+I_(c) when thecurrent switch 111A is ON and I_(c) below I_(b)+I_(c) when the currentswitches 111A and 111B are both OFF.

Accordingly, as is the case with the concrete example depicted in FIG.10, upon each input of the pulse P, the light emitting device LD isdriven by the current of the waveform which goes positive and negativesymmetrically with respect to the mean current I_(b)+I_(c) and withoutchanging the men current value; therefore, it will easily be understoodthat the concrete example of FIG. 14 also produces the same effects asthose described previously in respect of FIGS. 10 to 13.

Moreover, in this concrete example, even if the pulse width Pw of theinput pulse P is longer than the delay time Td of the delay elements 113and 117, the pulse waveform of the optical pulse that is emitted by thelight emitting device LD is limited to a fixed pulse width determined bythe delay time Td of the delay element. Since the output optical pulseis limited to a constant value even if the pulse width of the inputpulse P is long, it is possible to avoid a disadvantage that thereference voltage available from the smoothing circuit 107B (see FIG.12) varies at the receiving side due to the transmission thereto of apulse of a long pulse width.

Furthermore, since the concrete example of FIG. 14 has a construction inwhich the fall edge side of the pulse P to be transmitted is detected togenerate the optical pulse, the light emitting device LD is driven in astate more stable than in the case of utilizing the initial waveformportion of the rise edge of the signal; hence, it is also possible toaccurately define the timing (the waveform depicted in FIG. 15F) fordriving the light emitting device LD.

FIG. 16 illustrates still another specific operative example of theoptical pulse transmitting device 101. This example shows the case oftransmitting the pulse width of the optical pulse to the receiving side.That is, this example has an arrangement that drives the light emittingdevice by a symmetrical signal which goes positive and negative at bothof the rise timing and the fall timing of the pulse P to be transmitted.

The control circuit for the current switch 111A is made up of, in thisexample, two AND gates 118 and 119 and a NOR gate 120. The AND gate 118is supplied with an input pulse P (FIG. 17A) and a pulse P_(B) (FIG.17B) having passed through the inverter 112 and the delay element 113,the other AND gate 119 is supplied with the pulse P_(B) (FIG. 17B)having passed through the inverter 112 and the delay element 113 and apulse P_(C) (FIG. 17C) having passed through the inverter 116 and thedelay element 117, and the outputs from the AND gates 118 and 119 areoutput via the NOR gate 120. As a result, a negative pulse P_(D)depicted in FIG. 17D is provided at the output of the NOR gate 120. Thisnegative pulse P_(D) is generated at both of the rise timing and thefall timing of the input pulse P and fed to the current switch 111A.Hence, the current switch 111A is held OFF by a time interval equal tothe delay time Td at both of the rise and the fall timing of the inputpulse P.

The control circuit for the current switch 111B in this example, isformed by two NOR gates 121 and 122 and an OR gate 123. The NOR gate 121is supplied with the input pulse P (FIG. 17A) and the pulse P_(B) (FIG.17B) having passed through the inverter 112 and the delay element 113,the other NOR gate 122 is supplied with the pulse P_(B) (FIG. 17B)having passed through the inverter 112 and the delay element 113 and thepulse P_(C) (FIG. 17C) having passed through the inverter 116 and thedelay element 117, and the outputs from the NOR gates 121 and 122 areoutput via the OR gate 123, which provides at its output a positivepulse P_(E) depicted in FIG. 17E.

Through ON-OFF control of the current switches 111A and 111B by thepulses P_(D) and P_(E), a current I shown in FIG. 17F is injected intothe light emitting device LD, which emits optical pulses correspondingto the value of the current I.

FIG. 17G depicts the output signal which is provided from thecurrent-to-voltage converting circuit 107A when the receiving deviceshown in FIG. 12 receives the optical pulse emitted from the lightemitting device driven by the current I shown in FIG. 17F. The timeinterval between respective zero-crossing points of the voltage outputsignal matches the pulse width Pw of the input pulse P at thetransmitting side, and the voltage comparator 107C yields at its outputterminal 107D a negative pulse P_(H) depicted in FIG. 17H in thisexample. Thus, the receiving side receives the pulse P_(H) of the samepulse width Pw as that of the input pulse P at the transmitting side.

As is the case with the example described previously with reference toFIGS. 10 to 13, since the optical pulse is transmitted as a symmetricalwaveform which goes positive and negative about the mean currentI_(b)+I_(c) (FIG. 17F), the mean value of light on the opticaltransmission line will not vary depending on the presence or absence ofa signal. Accordingly, as referred to previously in respect of FIGS. 10to 13, the smoothed output voltage of the smoothing circuit 107B placedat the stage preceding the voltage comparator 107C is kept at a constantvalue without undergoing any variations depending on whether a signal isreceived or not. Furthermore, even in the case where the injectedcurrent vs. output light power characteristic (see FIG. 24) of the lightemitting device LD varies due to a temperature change or the like andthe mean current value to be transmitted and the smoothed output voltagevary correspondingly, the hysteresis width of the voltage comparator107C follows mainly the smoothed output voltage, so that the pulse widthof the received pulse P_(H) accurately matches the pulse width Pw of theinput pulse P at the transmitting side irrespective of thecharacteristic variation of the light emitting device LD.

Next, a fourth embodiment of the present invention will be describedwith reference to the drawings associated therewith.

A description will be given first, with reference to FIG. 19, of ageneral configuration of an optical transmission system employing alight intensity modulation device according to the fourth embodiment. Inthis optical transmission system, the transmitting side T has a lightintensity modulation device 460 and the receiving side R has anAC-coupled receiving device 461 and a discrimination circuit 462, thetransmitting side T and the receiving side R being interconnected via anoptical fiber 463.

The signal that is transmitted in this optical signal transmissionsystem is not data of a binary signal but a timing signal whichindicates a point in time when the leading or fall edge of the waveformof the binary signal, that is, the amplitude value (level) of the riseor fall of the transmitting signal exceeds a predetermined amplitudevalue (level).

FIG. 20 is a timing chart for explaining the operation of the opticaltransmission system depicted in FIG. 19; the timing chart showswaveforms, for example, in the case of detecting the rise edge of thewaveform (timing when the amplitude value of the rise edge exceeds 50%)and transmitting it. With reference to FIG. 20, the operation of eachcircuit will hereinafter be described concretely.

The light intensity modulation device 460 generates a pair of pulses (b)which reverse their polarity at the rise timing of a binary digitalinput signal (a). This opposite-polarity pulse pair (b) needs only tohave a pulse width sufficiently smaller than the minimum pulse intervalof the waveform of the original transmitting signal. In other words, thepulse width of the opposite-polarity pulse pair (b) defines the minimumpulse interval of the waveform of the original transmitting signal.

Incidentally, even when the opposite-polarity pulse pair (b) becomessuch a delayed pulse pair (e) as indicated by the broken lines in FIG.20 due to some delay in its generation, it can be used as a timingsignal at the transmitting side without difficulty if the delay isalways a fixed and known value.

The light intensity modulation device 460 is driven based on theopposite-polarity pulse pair; that is, a light emitting device (notshown) is driven by a conventional modulation method which modulates thelight intensity of offset light, generating as a light intensity signal© a pair of optical pulses that have reversed their polarity at thetiming when the amplitude value of the rise edge of the transmittingpulse signal waveform exceeds a predetermined value. The light intensitysignal (c) is sent over the optical fiber 463 to the receiving side R.

The AC-coupled receiving circuit 461 is a circuit that detects thereceived light intensity signal (c) by the conventional AC-couplingmethod, by which is detected such a received signal (d) as shown at thebottom of FIG. 20. In this instance, since the received light intensitysignal (c) is an optical pulse signal modulated based on the pair ofopposite-polarity pulses (b) that reverse their polarity to each otherat the rise timing, it has always opposite-polarity pulses. Hence, thereis no possibility that the received signal (d) to be detected containsmany pulses inclining toward one particular polarity.

The discrimination circuit 462, which forms signal regenerating means,discriminates from the received signal (d) detected by the AC-coupledreceiving circuit 461, the rise edge (timing of the received signalexceeding a predetermined amplitude value). To discriminate the timingof the rise edge, the following operation is performed based on athreshold level L1 (see FIG. 20) with reference to which the timingdiscrimination is made, and a discrimination start level L2 (see FIG.20) which is preset at a level low enough to permit separation of noiseand signal and provides the timing for the initiation of thediscriminating operation.

At the instant A when the rise edge of the received signal (d) crossesthe discrimination start level L2, the discrimination circuit 462 isinstantaneously activated, which generates a timing signal upondiscrimination of the instant when the received signal crosses thethreshold level L1 within a fixed delay time. That is, thediscrimination circuit 462 remains operative only by a time intervalsubstantially corresponding to the pulse width after the instant of therise edge having crossed the discrimination start level L2, anddetermines the instant of the received signal (d) having crossed thethreshold level L1 as discrimination timing, generating the timingpulse. The signal regeneration processing is carried out based onindividual timing pulses. With this discriminating operation, since thediscrimination circuit 5 does not operate when no pulse is present, itwill not erroneously discriminate a low-level fluctuation due to noiseas a pulse.

In the signal regeneration processing, the rise edge can be regeneratedby using the timing pulse (the rise timing, for instance) available fromthe discrimination circuit 462, for example, as a set signal of anasynchronous RS (set-reset) flip-flop circuit.

With the configuration depicted in FIG. 19, the light intensitymodulation device 460 generates opposite-polarity pulse pairs (which areopposite in polarity to each other) based on the timing of both of theleading and fall edges of the transmitting signal; in the case ofperforming high-speed optical transmission, it is desirable to providetwo transmission channels for transmitting the leading and fall edges ofthe transmitting signal separately of each other as described below.

That is, detecting circuits (formed by logic circuits or the like) areprovided individually for detecting the leading and fall edges of thetransmitting signal, respectively, and a light intensity modulationdevice is provided for each detecting circuit, and the rise timing andfall timing are transmitted separately. In this instance, the receivingside also has a two-channel circuit configuration which consists of arise timing receiving channel and a fall timing receiving channel, andtiming pulses relating to the leading and fall edges are generated inthe individual transmission channels and signal regeneration processingis performed accordingly.

In the signal regeneration processing, the leading and fall edges can bereproduced by using the timing pulses from the respective discriminationcircuits as set and reset signals of the asynchronous RS flip-flopcircuit, respectively. By this, the original binary transmitting signalwaveform can be regenerated.

Next, a detailed description will be given of a concrete circuitconfiguration and operation of the light intensity modulation device460.

FIG. 18 is a circuit diagram illustrating a first concrete example of alight intensity modulation device according to a third embodiment of thepresent invention, and FIG. 21 is a timing chart for explaining itsoperation. This light intensity modulation device comprises a drivingcircuit provided with current switching circuits 401 to 403, and asemiconductor laser 405 connected to output terminals 404 a and 404 b ofthe driving circuit.

The current switching circuit 401 is made up of transistors 411 a to 411c and a resistor 412 for current regulation use. The transistor 411 ahas its collector connected to a line of the output terminal 404 a (Inthis example the line connected to the output terminal 404 a is called aV_(CC) line.), has its base connected to a digital signal input terminal406 a and has its emitter connected to the emitter of the transistor 411b and the collected of the transistor 411 c in common to them. Thetransistor 411 b has its collector connected to the output terminal 404b and has its base connected to a digital signal input terminal 406 b.The transistor 411 c has its emitter grounded via the resistor 412, bywhich a constant-current source is formed.

The current switching circuit 402 is made up of transistors 421 a to 421c and a resistor 422 for current regulation use. The transistor 421 ahas its base connected to the signal input terminal 406 a via a delaycircuit 407 a, has its collector connected to the output terminal 404 band has its emitter connected to the emitter of the transistor 421 b andthe collected of the transistor 421 c in common to them. The transistor421 b has its collector connected to the line (the V_(CC) line) of theoutput terminal 404 a and has its base connected to the digital signalinput terminal 406 b via a delay circuit 407 b. The transistor 421 c hasits emitter grounded via the resistor 422, by which a constant-currentsource is formed. The resistance value of the resistor 422 is ½ that ofthe resistor 412 of the current switching circuit 401.

The current switching circuit 403 is made up transistors 431 a to 431 cand a resistor 432 for current regulation use. The transistor 431 a hasits connector connected to the line (VCC line) of the output terminal404 a, has its base connected to the digital signal input terminal 406 avia the delay circuits 407 a and 407 c and has its emitter connected tothe emitter of the transistor 431 b and the collector of the transistor431 c in common to them. The transistor 431 b has its collectorconnected to the output terminal 404 b, has its base connected to thedigital signal input terminal 406 b via the delay circuits 407 b and 407d and has its emitter grounded via the resistor 432, by which aconstant-current source is formed. The resistance value of the resistor432 is set at the same value as that of the resistor 412 of the currentswitching circuit 401.

The bases of the transistors 411 c, 421 c and 431 c of the currentswitching circuits 401 and 403 are connected in common to the base of atransistor 408 and to a terminal 410 a. The transistor 408 has itscollector connected to its base in common thereto and has its emittergrounded via a resistor 440. By this, a predetermined current can be fedto the output terminal 404 b for current supply to the semiconductorlaser 405 in accordance with a current that is supplied to the terminal410 a.

Furthermore, there is provided a transistor 410 which has its emittergrounded via a resistor 441, has its base connected to an outputterminal 410 b and has its collector connected to the output terminal404 b. By this, a predetermined bias current can be supplied to thesemiconductor laser 405 in accordance with a current that is supplied tothe terminal 410 b.

In the light intensity modulation device of the above construction,differential digital signals which are opposite in logic to each otherare applied to the digital signal input terminals 406 a and 406 b. Whensuch signal-changing timing as shown in FIG. 21(a) occurs in the inputdifferential digital signals, the first-stage current switching circuit401 switches accordingly, causing in the semiconductor laser 405 such acurrent change as depicted in FIG. 21(b).

When the current switching circuit 401 switches, the second-stagecurrent switching circuit 402 switches after a certain elapsed time bythe delay circuits 407 a and 407 b (or due to a difference in responsespeed between the current switching circuits 401 and 402), with theresult that such a current change as shown in FIG. 21(c) is provided tothe semiconductor laser 405. In this case, since the current switchingcircuits 401 and 402 are adapted to be opposite in logic to each otherand since their resistors 412 and 422 for current regulation use areadapted so that the resistance value of the resistor 422 is ½ that ofthe resistor 412, the current switching circuit 402 causes a currentchange twice larger than that by the current switching circuit 401.

When the current switching circuit 402 switches, the third-stage currentswitching circuit 403 switches after a certain elapsed time by the delaycircuits 407 c and 407 d (or due to a difference in response speedbetween the current switching circuits 402 and 403), with the resultthat such a current change as shown in FIG. 21(d) is further provided tothe semiconductor laser 405. In this case, since the current switchingcircuits 401 and 403 are common in logic and since their resistors 412and 432 for current regulation use have the same resistance value, thecurrent switching circuit 403 causes a current change equal to that bythe current switching circuit 401.

By the above-described switching of the current switching circuits 401to 403, such a current variation as shown in FIG. 21(e) is caused in thesemiconductor laser 405. As a result, the semiconductor 405 is driven bysuch a current waveform as depicted in FIG. 21(e), that is, aopposite-polarity pulse pair, so that the rise timing and the falltiming can be optically transmitted as a pair of opposite-polaritypulses as described previously.

The light intensity modulation device described above is configured sothat the current switching circuit 402 provides a current supply twicelarger than those by the other current switching circuits by setting theresistance value of the resistor 422 of the switching circuit 402 to be½ the resistance values of the resistors 421 and 423 of the otherswitching circuits; however, the present invention is not limitedspecifically to this configuration. For example, the current source ofthe current switching circuit 402 may be connected to a line which isdifferent from those connected to the other switching circuits and iscapable of supplying current twice larger than those of the otherswitching circuits.

Moreover, the input-side comparator depicted in FIG. 26 may be providedat the side of the digital signal input terminal as shown in FIG. 22 sothat differential digital signals are generated which are opposite inlogic in accordance with the digital input signal.

In the light intensity modulation device of this example, light emittingmeans (the light emitting device) may be formed by various semiconductorlasers, and other light emitting means (a light source) may be employedif optical transmission of its output light is possible. The opticaltransmission system using the above-described light intensity modulationdevice can be applied, for example, to a semiconductor device tester. Insuch an instance, a transmitting part composed of a transmittingwaveform converting circuit and a light intensity modulation circuit isprovided, for example, in the tester proper of the semiconductor devicetester, and a receiving part composed of an AC-coupled receivingcircuit, a discrimination circuit and an asynchronous RS flip-flop isprovided in the test head, the transmitting part and the receiving partbeing interconnected via an optical fiber.

With such a configuration, a signal in which many periods are mixed andthe binary data to be sent heavily inclines toward one particular value(0 or 1)—which is transmitted between the tester proper and the testhead of the semiconductor device tester—is transmitted after conversionto transmitting pulse signals composed of a pair of opposite-polaritypulses which indicate the rise and the fall timing of the signalwaveform, and the original transmitting signal waveform is electricallyreproduced from the received rise and fall timing; hence, the signalregeneration can be performed without causing polarity and timingerrors. This also permits accurate discrimination of DC-wise data fixedfor a long time.

While the above semiconductor device tester has the transmitting part inthe tester proper and the receiving part in the test head, it is alsopossible to employ a configuration opposite thereto (a configuration inwhich the tester proper has the receiving side and the test head thetransmitting part).

As will be evident from the above, according to the present invention,there is no possibility that the threshold level inclines toward oneparticular data value of a binary signal, causing a timing error as inthe past, and DC-wise data fixed for a long time can also bediscriminated with accuracy; hence, a signal which is high in timingaccuracy and unstable in period and contains a DC component can also beoptically transmitted with high accuracy.

Thus, the present invention has an outstanding advantage that a signalin which many periods are mixed and binary data heavily inclines towardone particular value (0 or 1), like a signal which is transmittedbetween the tester proper and the test head of the semiconductor devicetester, can also be optically transmitted with high accuracy.

Besides, when the polarity of data is left under a certain condition(under no-signal condition), a low-level fluctuation due to noise insuch a state will not erroneously be detected as data; therefore, thepresent invention provides an advantage in offering a highly reliableoptical transmission system.

With the application of the optical transmission system and method whichproduce such effects as mentioned above, the semiconductor device testerobtains the advantages of increased transmission rate, improvedfrequency characteristic, enhanced reliability and lightness.

According to the present invention, the waveform of an optical pulse tobe transmitted over an optical transmission line is transmitted as asymmetrical waveform which goes both positive and negative equally abouta bias value and whose mean value is equal to the bias value, and hencethe DC component on the transmission line will not vary even if thesignal transmission density changes. Thus, no jitter will be generateddue to variations in the DC component contained in the signal beingtransmitted.

Furthermore, the DC component is added to the pulse waveform to betransmitted and since the receiving side uses the DC component togenerate a reference voltage from the smoothing circuit 107B. Therefore,even in the case where the mean quantity of light emitted from the lightemitting device LD varies with a change in its injected current vs.output light power and the reference voltage available from thesmoothing circuit 107B varies accordingly, the voltage comparator 107Cresponds thereto by causing the hysteresis width to follow mainly thereference voltage, so that if the hysteresis width remains constant, thepoint of detection of the pulse at the receiving side remains unchanged,suppressing the generation of jitter.

In addition, when the point of detection of the pulse at the receivingside is set at a zero-crossing point of the symmetrical waveform, thereceived signal crosses the bias point at the highest speed; therefore,the configuration which detects the received pulse at this zero-crossingpoint provides an advantage that the receiving point can be detectedwith the highest degree of accuracy.

Additionally, according to the present invention, when theopposite-polarity pulse pair is generated, the edges of the both pulsewaveforms do not become discontinuous as in the prior art—this permitsoptical signal transmission with high timing accuracy.

For the reasons given above, the light intensity modulation device,which produces such effects as mentioned above, provides the opticaltransmission system or semiconductor device tester with advantages suchas increased signal transmission rate, improved frequencycharacteristic, reduced weight and enhanced reliability.

What is claimed is:
 1. An optical transmission system comprising: in thetransmitting side thereof, first edge detecting means and second edgedetecting means for detecting a rise edge and a fall edge of a signalwaveform to be transmitted, respectively; first transmitting pulsegenerating means for generating a first transmitting pulse signalconstituted by a pair of opposite-polarity pulses, the opposite-polaritypulse pair inverting in their polarities at the point of the rise edgedetection timing by said first edge detecting means; second transmittingpulse generating means for generating a second transmitting pulse signalconstituted by a pair of opposite-polarity pulses, the opposite-polaritypulse pair inverting in their polarities at the point of the fall edgedetection timing by said second edge detecting means; first lightintensity modulation means for generating a first light intensitymodulated signal based on said first transmitting pulse signal; andsecond light intensity modulation means for generating a second lightintensity modulated signal based on said second transmitting pulsesignal; and in the receiving side thereof, first AC-coupled receivingmeans for receiving said first light intensity modulated signal toobtain a first received signal consisting of only an AC componentextracted from said first light intensity modulated signal; secondAC-coupled receiving means for receiving said second light intensitymodulated signal to obtain a second received signal consisting of onlyan AC component extracted from said second light intensity modulatedsignal; first discriminating means for discriminating the rise timingfrom said first received signal; second discriminating means fordiscriminating the fall timing from said second received signal; andsignal regenerating means for regenerating the rise edge and fall edgerelating to said signal waveform to be transmitted on the basis of saiddiscriminated rise timing and the fall timing.
 2. The opticaltransmission system as claimed in claim 1, wherein said firstdiscriminating means discriminates, as the rise timing, a time point atwhich the polarity of the first received signal inverts, and said seconddiscriminating means discriminates, as the fall timing, a time point atwhich the polarity of the second received signal inverts.
 3. The opticaltransmission system as claimed in claim 2, wherein on the basis of arise discrimination reference level serving as a reference fordiscrimination of the rise timing and a rise discrimination start levelproviding a timing for starting the discriminating operation of the risetiming, said first discriminating means is caused to be operative onlyduring a fixed time interval starting at a time point when the rise edgeof the first received signal intersects said rise discrimination startlevel, and discriminates, as the rise timing, a time point when thefirst received signal intersects said rise discrimination referencelevel during said first discriminating means is operative; and whereinon the basis of a fall discrimination reference level serving as areference for discrimination of the fall timing and a falldiscrimination start level providing a timing for starting thediscriminating operation of the fall timing, said second discriminatingmeans is caused to be operative only during a fixed time intervalstarting at a time point when the fall edge of the second receivedsignal intersects said fall discrimination start level, anddiscriminates, as the fall timing, a time point when the second receivedsignal intersects said fall discrimination reference level during saidsecond discriminating means is operative.
 4. The optical transmissionsystem as claimed in claim 1, wherein said signal regenerating means isconstituted by an asynchronous SR flip-flop circuit which is set by therise timing discriminated by said first discriminating means and resetby the fall timing discriminated by said second discriminating means. 5.An optical transmission system comprising: in the transmitting sidethereof, first edge detecting means and second edge detecting means fordetecting a rise edge and a fall edge of a signal waveform to betransmitted, respectively; first transmitting pulse generating means forgenerating a first transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the rise edge detection timing by saidfirst edge detecting means; second transmitting pulse generating meansfor generating a second transmitting pulse signal constituted by a pairof opposite-polarity pulses, the opposite-polarity pulse pair invertingin their polarities at the point of the fall edge detection timing bysaid second edge detecting means and having the inverted polarities ofsaid first transmitting pulse signal; light intensity modulation meansfor generating a light intensity modulated signal based on the firsttransmitting pulse signal and the second transmitting pulse signal; andin the receiving side thereof, AC-coupled receiving means for receivingthe light intensity modulated signal to obtain a received signalconsisting of only an AC component extracted from said light intensitymodulated signal; discriminating means for detecting, from the receivedsignal, signals relating to the first and the second transmitting pulsesignals as well as discriminating the rise timing and the fall timing onthe basis of the relationship of their polarities inverted each other;and signal regenerating means for regenerating the rise edge and thefall edge relating to said signal waveform to be transmitted on thebasis of the rise timing and the fall timing.
 6. The opticaltransmission system as claimed in claim 5, wherein said discriminatingmeans comprises: a first discrimination circuit for discriminating, asthe rise timing, a time point when the polarity of that signal in thereceived signals which relates to the first transmitting pulse signalinverts from positive to negative; and a second discrimination circuitfor discriminating, as the fall timing, a time point when the polarityof that signal in the received signals which relates to the secondtransmitting pulse signal inverts from negative to positive.
 7. Theoptical transmission system as claimed in claim 6, wherein, on the basisof a discrimination reference level serving as a reference fordiscrimination of a timing, a rise discrimination start level providinga timing for starting the discriminating operation of the rise timing,and a fall discrimination start level providing a timing for startingthe discriminating operation of the fall timing, in case ofdiscriminating the rise timing, said first discriminating means iscaused to be enabled only during a fixed time interval from as well assaid second discriminating means is caused to be disabled from a timepoint when the rise edge of the first received signal intersects saidrise discrimination start level, and during said first discriminatingmeans is enabled, a time point when the received signal intersects saiddiscrimination reference level is discriminated as the rise timing; andin case of discriminating the fall timing, said second discriminatingmeans is caused to be enabled only during a fixed time interval from aswell as said first discriminating means is caused to be disabled from atime point when the fall edge of the received signal intersects saidfall discrimination start level, and during said second discriminatingmeans is enabled, a time point when the received signal intersects saiddiscrimination reference level is discriminated as the fall timing. 8.The optical transmission system as claimed in claim 5, wherein saidsignal regenerating means is constituted by an asynchronous SR flip-flopcircuit which is set by the rise timing and reset by the fall timingdiscriminated by said discriminating means, respectively.
 9. Asemiconductor device testing apparatus provided with the opticaltransmission system described in any one of claims 1 to 8 and in which atester proper of the testing apparatus for transmitting a binary signaland a test head of the testing apparatus for receiving a binary signalare interconnected via an optical fiber and an optical transmission iseffected between said tester proper and said test head using the opticaltransmission system.
 10. A method of transmitting an optical signalcomprising: a first step of detecting a rise edge and a fall edge of asignal waveform to be transmitted, respectively; a second step ofgenerating a first transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the rise edge detection timing as wellas generating a second transmitting pulse signal constituted by a pairof opposite-polarity pulses, the opposite-polarity pulse pair invertingin their polarities at the point of the fall edge detection timing; athird step of generating a first light intensity modulated signal basedon the first transmitting pulse signal and a second light intensitymodulated signal based on the second transmitting pulse signal, andsending out these modulated signals separately onto an opticaltransmission line; a fourth step of receiving the first and the secondlight intensity modulated signals individually and obtaining first andsecond received signals consisting of only AC components respectivelyextracted from the first and the second light intensity modulatedsignals; and a fifth step of discriminating a rise timing from the firstreceived signal as well as discriminating a fall timing from the secondreceived signal, and regenerating a rise edge and a fall edge relatingto said signal waveform to be transmitted on the basis of the risetiming and the fall timing thus discriminated.
 11. The method as claimedin claim 10, wherein the discrimination of the rise timing and the falltiming in said fifth step is performed by discriminating the time pointat which the polarity of the first received signal inverts as the risetiming and the time point at which the polarity of the second receivedsignal inverts as the fall timing.
 12. The method as claimed in claim11, wherein in case of discriminating the rise timing, on the basis of arise discrimination reference level serving as a reference fordiscrimination of a rise timing and a rise discrimination start levelproviding a timing for starting the discriminating operation of the risetiming, a time point when the first received signal intersects said risediscrimination reference level within a fixed time interval starting ata time point when the rise edge of the first received signal intersectssaid rise discrimination start level is discriminated as the risetiming; and in case of discriminating the fall timing, on the basis of afall discrimination reference level serving as a reference fordiscrimination of a fall timing and a fall discrimination start levelproviding a timing for starting the discriminating operation of the falltiming, a time point when the second received signal intersects saidfall discrimination reference level within a fixed time intervalstarting at a time point when the fall edge of the second receivedsignal intersects said fall discrimination start level is discriminatedas the fall timing.
 13. A method of transmitting an optical signalcomprising: a first step of detecting a rise edge and a fall edge from asignal waveform to be transmitted, respectively; a second step ofgenerating a first transmitting pulse signal constituted by a pair ofopposite-polarity pulses, the opposite-polarity pulse pair inverting intheir polarities at the point of the rise edge detection timing as wellas generating a second transmitting pulse signal constituted by a pairof opposite-polarity pulses, the opposite-polarity pulse pair invertingin their polarities at the point of the fall edge detection timing andhaving the inverted polarities of said first transmitting pulse signal;a third step of generating a light intensity modulated signal based onthe first and the second transmitting pulse signals and sending out themodulated signal onto an optical transmission line; a fourth step ofreceiving the light intensity modulated signal to obtain a receivedsignal consisting of only an AC component extracted from the lightintensity modulated signal; and a fifth step of detecting, from thereceived signal, signals relating to the first and the secondtransmitting pulse signals as well as discriminating the rise timing andthe fall timing on the basis of the relationship of their polaritiesinverted each other, and regenerating the rise edge and the fall edgerelating to said signal waveform to be transmitted on the basis of thediscriminated rise timing and the fall timing.
 14. The method as claimedin claim 13, wherein the discrimination of the rise timing and the falltiming in said fifth step is performed by discriminating, as the risetiming, a time point when the polarity of that signal in the receivedsignals which relates to the first transmitting pulse signal invertsfrom positive to negative; and discriminating, as the fall timing, atime point when the polarity of that signal in the received signalswhich relates to the second transmitting pulse signal inverts fromnegative to positive.
 15. The method as claimed in claim 14, wherein, onthe basis of a discrimination reference level serving as a reference fordiscrimination of a timing, a rise discrimination start level providinga timing for starting the discriminating operation of the rise timing,and a fall discrimination start level providing a timing for startingthe discriminating operation of the fall timing, in case ofdiscriminating the rise timing, the rise timing discrimination isenabled only during a fixed time interval from as well as the falltiming discrimination is disabled from a time point when the rise edgeof the received signal intersects said rise discrimination start level,and within said fixed time interval, a time point when the receivedsignal intersects said discrimination reference level is discriminatedas the rise timing; and in case of discriminating the fall timing, thefall timing discrimination is enabled only during a fixed time intervalfrom as well as the rise timing discrimination is disabled from a timepoint when the fall edge of the received signal intersects said falldiscrimination start level, and within said fixed time interval, a timepoint when the received signal intersects said discrimination referencelevel is discriminated as the fall timing.